Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(23.9) 0.9 18 2 EB P EA 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (LL) 52-SY7420-LL-02 (-F2) 3 5 L 170.6 (Lead wire length) Insulation: Red (+) Insulation: Black () 4.1 14.7 12 0.3 mm2 91.8 Cable type (TT) 52-SY7420-TT-02 (-F2) 3 5 Max.10 L 204.2 (Lead wire length) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 108.6 10 ATEX Compliant Body Ported Type

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

M): 10-SYJ74M-M01 02 DIN terminal (D, Y): 10-SYJ74MD Y01 02 M8 connector (WO): 10-SYJ74M-WO01 02 01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) Max. 10 91.5 84 58 [65] 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 89.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6

F

KM12-06-02-6 6 99 47 84 6 14 17 10 19.5 31.5 21.5 31 13 13.5 17 7.5 KM12-06-02-10 10 125 73 96 KM12-08-03-6 6 108 55 100 8 38 19 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 9 KM12-08-03-10 10 139 86 117 L5 T N H L3 L4 L6 P Q1 Q2 M L1 F L2 B Port Min Weight Model NPT Hex Inside Dia (g) (Inch Size) 19.5 6 16 16 18 29.5 29 40 12 1/4 87 5/32 10 6 67 KM12-03-35-6 19.5 10 16 16 18 29.5 29 61.5 12 1/

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Series AK1000

160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600 Delivery pressure (kPa) -35 500 -48 400 -61 300 -75 200 -88 100 -101 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(mm) Elbow type TMH 6 8 10 12 Tube swivels 360 AS121F-M5-W2 M5 ASD Application to inch size tubing Metric size 6, 8, 10, 12 AS221F-01-W2 R1/8 AS221F-02-W2 R1/4 AS AS321F-02-W2 R1/4 Maximum operating pressure 1 MPa max.

Speed Controller with

Metric Size Applicable tube Tube size 4 6 8 10 12 23 04 06 08 10 12 Applicable series 3.2 TMH-23J TMH-04J TMH-06J AS1002F AS2002F AS2052F AS3002F AS4002F TMH-06 TMH-07 TMH-08 TMH-10 TMH-12 TMH-13 Holder for speed controller Note) The applicable TMH for AS1002F-02 is not available.

Dual Speed Controller with One-touch Fitting Series ASD 1

15.2 40.4 35.4 15 18.5 11 R 1/4 17 34.4 29.4 55 18.5 46.5 28.2 19.7 10 ASD430F-02-10S 18.5 58 21 49.3 31 6 ASD530F-02-06S 12.8 74 17 48.3 25.2 20.3 8 ASD530F-02-08S 15.2 76 18.5 51.3 28.2 41.9 46.9 48.8 43.8 19.8 23 15.4 R 1/4 19 42.8 37.8 10 ASD530F-02-10S 18.5 80 21 54.1 32.6 23.1 12 ASD530F-02-12S 83 20.9 22 55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5

ASD

41.7 40.4 35.4 15.2 18.5 15 11 R(PT)1/4 17 34.4 29.4 18.5 55 28.2 46.5 19.7 10 ASD430F-02-10S 18.5 21 58 31 49.3 6 ASD530F-02-06S 12.8 17 74 25.2 48.3 20.3 8 ASD530F-02-08S 15.2 18.5 76 28.2 51.3 41.9 46.9 48.8 43.8 23 19.8 15.4 R(PT)1/4 19 42.8 37.8 10 ASD530F-02-10S 21 18.5 80 32.6 54.1 23.1 12 ASD530F-02-12S 22 20.9 83 34.4 55.9 6 ASD530F-03-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S

JXCx-OMT0061CN

CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-3 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 100 VAC (50 Hz) 110 VAC (60 Hz) 15 kg IDF-TR1000-3 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA Singlephase Singleturn 230 207 190 210 160 9 IDF-TR500-4 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5 27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 10 (12) 10 (12) 10 (12) 10 (13) 12 (14) 12 (14) 16

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250