2/3 Port Valve

-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2.0 1.5 2.0 1.5 1.5 1.5 1.0 1/8 (6A) 0.9 0.5 1.1 0.6 0.5 0.5 1.0 Construction/Components 260 0.4 0.2 0.45 0.2 0.2 0.15 0.45 2.0 1.5 2.0 1.5 1.5 1.5 1.0 Water oil air 3.0 Steam 1.0 VX21/22/23 (Orifice

Tamper Proof and Flat Head Screw

27.2 36.4 12.8 6 27.8 39.3 33.9 43.2 20 21 AS221F-N02-11ST AS321F-02-08ST 3/8" 17.9 15.2 8 18.5 29.5 41 55.3 49.3 21.8 R 1/4 19 1.5 23 9.5 AS321F-N02-07ST AS321F-02-10ST 18.5 1/4" 13.2 27.8 39.3 17 31.8 10 21 43.3 AS321F-N02-09ST AS321F-02-12ST 23 9.5 NPT1/4 19 20.9 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 12 22 44.3 32.8 AS321F-N02-11ST AS321F-03-06ST 12.8 17.9 3/8" 31.8 43.3 21 27.8

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

5 Port Solenoid Valve Series VQZ1000/2000/3000

Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 978.

CG1

Bore size (mm) C d H1 B1 D (15) (19.6) (21.9) (31.2) (37.0) (47.3) NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 M8 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 5 6 8 11 13 16 13 17 19 27 32 41 12.5 20 25, 32 40 50, 63 80 100 16.5 18 26 31 39 1-7-11 Series CDG1 Auto Switch Specifications Refer to p.5.3-2 for details of the auto switch.

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Speed Controller with Indicator

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Air Cylinder

5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 62 37 116 25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 41 120 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 41 122 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 45

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M