MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

High Vacuum Angle Valve, XL Series

Aluminum (setting temp.: 120C [248F]) Stainless steel (setting temp.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2

SMC CORPORATION OF JAPAN

The Logic Function Blocks .5-1 5.1 The AND Block . 5-1 5.2 The OR Block . 5-1 5.3 The NOT Block . 5-2 5.4 The XOR Block (Exclusive OR) . 5-2 5.5 The NAND Block (Not AND) . 5-2 5.6 The NOR Block (Not OR) . 5-3 viii PneuAlpha 6.

Secondary Batteries

(P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

CL

2 !3 !4 !5 !6 !

25

Transition wiring cable length (same cable length) m Power supply cable length: 3 m Transition wiring cable length (same cable length) m Power supply cable length: 10 m Bar length symbol 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 2.

CLQ

2".

CLK1

Reed switch Choke coil 5 32 22 5 13.6 500 (3000) [5000] 2 x 2-6 Resistor Depth of counter bore 2.4 2-3.4 through LED Zener diode D-P70 4 20 Blue () [Black] Brown (+) [White] D-P75 Reed switch Lead wire: Oil and fire resistant 0.75mm x 2 Effective operating range 3mm Case: PBT resin Fire resistant (UL94-V0) Resistor Operating range (Refer to the table below.) l 16 Most sensitive position LED

CRJ

2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

Applicable Auto Switch Model

Note 2) Refer to p.5.3-5 for lead wire length.

CRQ2

18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment section.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

LEKF-OMZ0035

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1 (in case with driver) (3) Motor cable 1 (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1 (in case with I/O connector) (2) Driver *2 1 (3) Motor cable (4) Encoder cable (5) Lock cable 24VDC Host controller, (1) Electric Actuator etc (6) I/O connector 2 *1 This picture is LECSA *2 The shape

Modular F.R.L. Units

Name plate and pressure gauge in imperial units: psi *6 *6 *6 *6 *6 Z*4 Name plate and pressure gauge in imperial units: psi *5 *5 *5 *5 *5 *5 *1 Options B, G, H are not assembled and supplied loose at the time of shipment. *2 Assembly of a bracket and set nuts (AR25-B to AR40-B) Including 2 mounting screws for the AR50-B and AR60-B *3 Mounting thread for pressure gauge: 1/8, Pressure gauge

Table of Contents

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

NCA1

G Across flat A A 1/16 Radial float H 1 Spherical motion E D B C E Dimensions H 1 1/2 2 1/4 2 1/4 Part No. NCA1-AC325 NCA1-AC800 NCA1-AC1000 A 3/4-16 1-14 1 1/4-12 B 1 3/4 2 1/2 2 1/2 C 2 5/16 2 15/16 2 15/16 D 5/16 1/2 1/2 E 1 1/8 1 5/8 1 5/8 F 31/32 1 3/8 1 3/8 G 7/8 1 1/4 1 1/4 Pivot Pins CP DD CL CD CL CD Dimensions Dimensions CL 2 5/8 3 1/8 4 1/8 CP 2.72 3.22 4.25 Part No.

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 2 DI1 CN1-23 DI2 DI1 DI0 Program method DI-1 0 0 0 Program No. 1 0 0 1 Program No. 2 0 1 0 Program No. 3 0 1 1 Program No. 4 1 0 0 Program No. 5 Point table No.