ZP

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2011 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PQ printing PQ 12450SZ Printed in Japan. D-DN

ZSE30A(F)/ISE30A

For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA MM U FD FT FX FY ZX ZY F H Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 44 4 39 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 55 5 45 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 67 5 55 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth

CC

CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

119 96 109 Body ported Base mounted 0.33 0.4 0.32 0.53 1.6 2.2 2 position C6 0.27 0.37 0.35 0.27 0.33 0.49 1.4 1.1 1.8[0.78] 1.9 2.5[1.3] 1.6 1/8 10-SYJ723--C6 (One-touch fitting for 6) 129 163 121 119 0.32[0.54] 0.30 0.61[0.38] 0.39 3 position 0.36[0.40] 0.45[0.22] 101 119 98 153 97 111 96 109 0.39 0.52 0.34 0.61 2.0 2.3 2 position C8 0.35 0.38 0.42 0.33 0.29 0.49 1.7 1.2 1.9[0.86] 2.0

PSE200.eng

OUT2 ( ) ( ) ( ) ( ) For compound For vacuum For low pressure For positive pressure 101 kPa -101 kPa [Default setting] 101 kPa 1 MPa During the zero clear operation, pressure above 5%F.S. (2.5%F.S. for compound pressure) has been applied. After 2 s, the mode will reset to the measurement mode. The set values are displayed in auto-preset as follows.

JXCx-OMT0005CN

Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 100 2 ALM FG READY 3 0 OUT 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 101 3 4-7 4byte 8-9 2byte 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM

JXCx-OMT0030CN

5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101

MQQ

REC TH CX CY TY TX MQQ M TV TW 2-TC RHC ZZ + Stroke MK(2) Bore size (mm) BB CD CX GB H NB R U Z ZZ S RS Q G 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 RS H A 16 18 5 6.6 24 30 30 10 114 128 74 8 RZQ T-bracket Dimensions Note) Applicable bore size (mm) Part no.

C95

-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25 37.5 37.5 37.5 37.5 37.5 37.5 50 50 50 50 50 50 75 75 75 75 75 75 75 75 87 87 103 103 88 88 100 100 116 116 100 100 112 112 128 128 113 113 125 125 141 141 138 138 150 150 166 166 32 40 50 63 80 100 1.11

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Basic With rear lock: CBM2B Bore size A-HN Stroke 20 Manual release non-locking style (Suffix: N) With air cushion (mm) S ZZ Double lock 137 141 141 167 Bore size (mm) 20 25 32 40 WB WA Double lock 83 83 83 101 Rear lock 72 72 72 93 Rear lock 126 130 130 159 Front lock 73 73 75 96 Front lock 127 131 133 162 8.5 10 11.5 15 11.5 11.5 11.5 14.5 -H -R -W N L Axial foot: CBM2L Bore size Stroke

CC

35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107 116 135 50

Modular F.R.L. Unit

29.5 5.5 3.2 65 2 Note 1) 141 123 36 80 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 105 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 105 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101

Modular F.R.L. Unit

29.5 141 5.5 3.2 65 2 Note 1) 123 36 60 126 55 57 41 35 0 14 7 7 4 71 64 28.5 194 153 38 80 167 55 57 41 35 3.5 194 14 7 7 4 71 66 30.5 153 38 80 167 72.5 75 50 40 3.5 226 18 9 88 35 9 4 74 187 40 110 220 77.5 80 50 40 18 9 88 35 3 226 9 4.6 74 187 38 110 235 93 96 70 50 3.3 20 11 11 6.4 115 84 44.5 303 264 43 110 282 98 96 70 50 3.3 318 20 11 11 6.4 117.5 84 44.5 279 45 110 292 98 101

MQQ

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 12 3.3 3.3 17.5 27.5 22 8 106 117 6 70.5 5 12 3.3 3.3 19 28 24 8 101 112 10 65 5 18 5 6.6 24 30 30 10 114 128 16 74 8 T-bracket related dimensions Note) Applicable bore size (mm) Part no.

SYJ300/500/700

Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 3 78 69 63 80 71 65 Station 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 3-2-9 10 Series VK3000 Base mounted (Side ported) Type 42 Manifold Grommet: G DIN terminal: D VV5K3-42Station -01 Courtesy

Proposals for Energy Saving

The accumulated flow display unit does not change in this case. 101 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Series PFA Operation Clearing the accumulated value Press the UP button while pressing the DOWN button. The accumulated value is cleared when the buttons are pressed continuously for 5 seconds or more.