Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) Pilot port (Pressurize to close) P-2 q Bonnet assembly (Maintenance parts)1 (Including w, e, y, u, i, o) Magnet (Option) Pilot port (Pressurize to open) P-1 r Exterior seal (Maintenance part)1 i Bellows holder (Material: Stainless steel 304) u Bellows assembly (Maintenance parts)1 (Including y, i) Bellows (Material: Stainless steel

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Y m x g m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Horizontal m Static load m M m x g x X m x g x X m x g x Z M Static moment M m x g x Y m x g x Y m x g x Z M z y Y Z m x g x X m x g x Y M m x g Note) m is a mass movable by thrust.

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

HRS100/150

Description Size 1 Valve Rc1/2 2 Valve Rc3/4 3 Y-strainer (#40) (Accessory) Rc3/4 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc1/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 1 MPa 8 Y-strainer (#40) or filter Rc3/4 Cable Specifications Power supply and signal cable should be prepared by user.

HRX-OM-X084

Description Qty Applicable model Anti-quake bracket A Anti-quake bracket B 2 2 4 4 HRR010-A/W-10/20-Y HRR012/018-A/W-10/20-Y HRR-TK001 Nut (M8) HRR024/030-A/W-20-Y Bolt (M8) HRR050-A/W-20-Y Mounting of anti-quake bracket 1. Remove the cap from M8 stud bolt. (4pcs) 2. Mount the anti-quake bracket A. (Recommended torque : 12.5Nm) 3. Mount the anti-quake bracket B.

MXW Series Long Stroke Slide Table

Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3 32 47 48 55 157 MXW8-50 71 4 30 46 76 53 182 Note) Adjuster bolt Y shown in the

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A A1 E1 L1 M10 x 1.25 +0.058 0 0.2 0.4 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 25 30 30 40 50 55 M8 x 1.25 16 20 36 44 56 64 11.5 14 14 20 27 31 21 25.6 41.6 50.6 64 72 8 10 10 14 18 22 8.5 10.5 16 20 23 24 8 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 M14 x 1.5 34 41 42 56 71 79 20 25, 32 40 50, 63 80 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 Data (Piston part) @3 y i e w y @3 i @3 y y i CXSWL1015 CXSW6 CXSW10 CXSW25, 32 Component Parts Note Nickel plated Note Hard anodized Hard chrome plated Hard chrome plated Description Material Special steel Synthetic resin Synthetic resin Polyurethane Chromium steel Aluminum alloy NBR NBR NBR NBR No. q w e r t y u i o !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

10

03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30

VQ7-6/7-8

e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.