4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Valve) DXT199-22-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

4/5 Port Air Operated Valve SYJA3000 Series

) 51 (25) Body ported 5 port Base mounted (with sub-plate) 4 Port Base Mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M5 x 0.8 M3 x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22

4-channel Flow Monitor ( compatible)

Set each P1/P2 (set value), referring to the Accumulated output mode on page 31.

3 Port Solenoid Valve/

Fixed orifice and variable throttle are available as a throttle for adjusting the pressure increase. (1, 1.5, 2) Output Pressure (P2) vs Time Graph Output P2 P1 P2 reaches half of P1, and then the main valve of the soft start-up valve turns on.

NVEPA|VEFseies

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l

Table of Contents

L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

7.4

Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.

Compact Guide Cylinder

Bore size [mm] R S T U VA VB WA WB X XA XB YY YL Z 10 st or less Over 10 st 30 st or less Over 30 st 100 st or less Over 100 st 10 st or less Over 10 st 30 st or less Over 30 st 100 st or less Over 100 st 12 43 22 50 37 47 33 20 40 110 15 25 60 20 3 3.5 M5 x 0.8 10 5 16 49 24 57 42 51 37 20 22 42 110 15 16 26 60 24 3 3.5 M5 x 0.8 10 5 20 60 28.5 71 49 66 44 24 44 120 30 40 78 28 3 3.5 M6

Magnetically Coupled Rodless Cylinder

Specifications Specifications Bore size CY3B Bore size CY3B Applicable series Applicable series 15 to 40 15 to 40 Construction Construction CY3B CY3B Special bearing Special bearing Dust seal (felt) 22 Series CY3B/CY3R Made to Order Specifications 3 Contact SMC for detailed specifications, lead times and prices.

VFR

Lead wire color Dot marking Orange Orange Yes Black Black Yes Green Green Yes Yellow Yellow Yes Brown Black Brown Orange Yellow Purple White White Red Yellow Red Black White Black 14 15 Pink 16 Blue 17 20 Red 21 22 Pink Red 23 Gray Red 24 25 18 Gray 19 13 14 15 17 Pink 19 Gray 21 23 16 18 Pink Yes 20 Gray Yes 22 24 Terminal no. Lead wire color Dot marking Terminal no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Specifications Specifications Bore size CY3B Bore size CY3B Applicable series Applicable series 15 to 40 15 to 40 Construction Construction CY3B CY3B Special bearing Special bearing Dust seal (felt) 22 Series CY3B/CY3R Made to Order Specifications 3 Contact P/A for detailed specifications, lead times and prices.

AC Servo Motor Driver (Pulse input type)

(Note 2) Alarm deactivation Display Name Alarm code AL.92 Battery cable Press disconnection warning Display CN1 CN1 CN1 Name "SET" on Alarm AL.96 Home position setting Power 22 23 24 current reset error OFF ON (bit2) (bit1) (bit0) alarm (RES) AL.99 Stroke limit warning screen.

ZQ-OM01401

PBT 2 ,Assy POM, 3 PBT 4 PBT 5 6 (PET) P.25 3 7 HNBR P.25 6 8 SUS 9 10 PC P.25 4 11 SUS 12 PVA P.25 5 13 P.2223 1 14 PBT 15 P.2425 2 16 (V) P.25 7 17 Ass'y P.25 9 O HNBR,NBR 21 - No.ZQ-OM01401-B 7.2 1 N.C., ZQ1-V114-5LUB-A (1) (2) (1) L L 0.3m LO L (2) B N.O. () ZQ1-V124-5MUB-A (1) (2) (1) M M (0.3m) MO M () (2) B () ZQ 1VQ110 L -5 L -A (1) (1) L L 0.3m LO L 22

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Direct Solenoid

Or.69c 5.8lack DlfrlENSlONS a c D E F tl K tl (tl 3 9613.3 9614.3 1.46 |.37\ 1.36 (35) 1.06 |.27\ 0.87 (22) 0.31 {7.9) 0.51 {12.9) 0.39 (9.9) o.22 (5.6) 0.25 (6.4) o.44 0.81 tm.6) Mlmelers In Parenthess 5 9613.5 9614.5 6sl,E' SMC Pneumatiqs Inc. 3Ol1 N. Franklin Rd. ' PO.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Refer to pages 20 through 22 for auto switch precautions. Minimum strokes for mounting of auto switches 40 50 63 Number of auto switches mounted Auto switch model Auto switch type 60 2 pcs. (same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs.

ZL3-OM00801

N.C. 24 No.ZL3-OM00801-A 11. ,, 11.1 25 No.ZL3-OM00801-A 11.2 11.3 (V),0, Pmax () (P1 Q1 ) (Qmax) 0() , 1L ZL3H ,-90kPa ,4.0 ,Pmax Qmax , 26 No.ZL3-OM00801-A 12. 12.1 12.2 0 27 No.ZL3-OM00801-A 13.

AC Servo Motor Driver (SSCNET Type)

When the logic of FLS and RLS is set to "positive logic" using Pr.22, Input signal logic selection", positioning control can be performed, even if FLS and RLS are not wired. -55- 7.4 Operating conditions The following conditions must be satisfied in order to start operation.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Clean Regulator/Fluororesin Type

Set pressure Inlet pressure P1: 0.5 MPa Outlet pressure P2: 0.1 MPa Fluid: Water Model: SRF30 0.5 Inlet pressure 0.45 Piping Caution 0.4 Pressure (MPa) 0.35 0.3 1. Connecting tubes with special tools. Refer to the pamphlet: High-Purity Fluoropolymer Fittings Hyper Fittings/LQ1,2 Series Work Procedure Instructions (M-E05-1) for tube connection and special tools. 2.