MY1

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

CEx-OMI0064

643ms 643ms ON(ON),BCD 39 - 10 10-1 10 8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

KK/KK13

S Couplers How to Order KK 13 S 02 M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material Plug

S Couplers Series KK/KK13

S Couplers Series KK13 How to Order KK 13 S 02 M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

MY1

MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 3.6 14.6 30 5.8 39.5 6 7 40.8 5.4 (Max.11) 4 20 32 5.8 45.5 3.6 6 10 RB0806 RB1007 40.8 5 (Max.11) 4 58 70 D24 38 6.5 53.5 7 12 3.5 46.7 5 (Max.16.5) 6 RB1412 RB1412 29 50 8.5 67 12 14 67.3 8 (Max.20) 88 104 4.5 6 -X 35 57 10 83 12 17 67.3 9 (Max.25) 4.5 6 RB2015 40 66 14 106 128 152 15 20 73.2 13 (Max.33) 6 5.5 Technical Data RB2015 52 77 14 129

Ionizer

Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.

DOC1020530

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

44

(inch) L Model KKA 1/8" (3.18) KFG2N-01 1.9 8 7.8 H 5/32" (4) KP KFG2N-03 1.9 8 7.7 1/4" (6.35) KFG2N-07 4.6 12 9 LQ 5/16" (8) KFG2N-09 6.7 14 10.1 L MQR 3/8" (9.53) KFG2N-11 10.7 17 11.7 T 1/2" (12.7) KFG2N-13 13 19 12.8 IDK 331 KFG2 Series Applicable Fluid List How to Read the Table : Completely unaffected or largely unaffected. : May be slightly affected, but, dependent upon condition,

Title not found

rc 1o Indcale thewnnO spec l.ar ons n the specilicalion sheet Note 4) F.r exlenal pr ol oplDn, F ndca|elhe qter.a p otsp6licaton R fordre appricabre var@s as @11 Note 5) The o!

HEC-OM-S008

Name Alarm flag 1,2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Unused 1 ERR01 System error 1 2 ERR02 System error 2 3 ERR03 Back-up data error Alarm flag 1 4-10 Unused 11 ERR11 DC power supply failure 12 ERR12 Internal temperature sensor High temperature failure 13 ERR13 Internal temperature sensor Low temperature failure 14 ERR14 Thermostat alarm Alarm given off status

PFxx-OMO0004CN

) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB 7 A*8 201 2~200L/min 8 2 (11

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

EXxx-OMN0027CN

SF BF: () (PLC) LED 27 PROFIBUS DP SF: BF PROFIBUS DP 11 SF BF SI 0126 1~125 SF BF PLC SF: BF SI PLC V_SEL PLC SI PWR LED DC24 V+10/-5 SI ~ SI 12 SI EX600-SPR1A (PNP ) EX600-SPR2A (NPN ) SI SI -49No.EX-OMN0027CN-D No. (PNPNPN) SI PWR LED DC24 V10% 13 (PNPNPN) SI PWR LED DC24 V+10/-5 PLC -50No.EX-OMN0027CN-D No.

o

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

o

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)