RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

Prevents Micro-Bubbles

10 11 12 13 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class Body class Tubing size Plug Tubing size Plug LVC 6 1/4" 6 1/4" LVA Base type 2 2 8 8 A Stacking type LVH 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" LVD 02 2 stations 3 3 12 1/2" 12 1/2" LVQ 05 5 stations 12 1/2" 12 1/2" LQ 4 4 19, 3/4" 19, 3/4" LVN TI/ TIL How to Order Valve PA LVH 2 0 S07 A PAX Body class

REC

D F G H E Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 M8 X 1.25 20 5 8 33.5 5 18 15.5 13 8 13 10 41 150 to 700 20 M10 X 1.25 25 6 8 37.5 5.5 22 19.5 17 10 13 10 45 150 to 700 26 M10 X 1.25 32 6 8 46.5 5.5 22 19.5 17 12 13 11 45 150 to 1000 26 M14 X 1.5 40 8 10 56.2 7 24 21 22 14 16 12.5 50 200 to1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range 1 8 30 20

VFR

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

ZPT/ZPX

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to

CLA

ZZ StrO ke ~ 131 71 339 65 12.5 80 ~ 148 72 358 65 14.0 81 367 P PG PH PL PW S W X V oLD LH LS LT LX LV r 40 7/16 20 27 50 30 63 % 16 31 80 37 81 51 244 43 11.2 59 F 90 58 266 52 11.2 66 ~ 'f, 106 58 290 52 11 .2 66 'I, 42 11 20 45 153 8 27 13 9 40 207 3.2 42 70 'I, 46 10 21 50 168 0 27 13 9 45 222 3.2 50 80 'I, 48.5 13 23 60 182 0 34 16 11.5 50 250 3.2 59 93 \I, 55 15 23 70 208 0 44 16

Rotary Actuator

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218

HRX-OM-Y098

Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Independent pump operation [Pump] . 5-12 Operation mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-15 5.4.4 Information screen . 5-17 Alarm reset . 5-18 HRL Series HRX-OM-Y098 Contents Alarm name .5-18 Alarm log record.5-19 Display of alarm/

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75

IDX-OM-W014

R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

RSQ

Bore size (mm) 12 Auto switch model 16 20 32 40 50 D-A7/A80 10 12 11 12 12 D-A7H/A80H D-A73C/A80C 14 13 14 13 13 D-A79W 9.5 D-A9/A9V 6 9.5 9.5 D-F7/J79 D-F7V/J79C 6 6 6 D-F7W/J7WV 6 5.5 D-F7BAL/F7BAVL D-F79F D-M9/M9V 3.5 3.5 3.5 D-F9W/F9WV 3 5.5 5.5 5.5 D-F9BAL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Magnet lever Note) Note) These items (no. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 140 and 141 for detailed specifications.

MGP

7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5

Best Pneumatics Vol. 14

9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

EXxx-OMN0037CN

12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10

VQ7-6/7-8

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None

CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178