PFxx-OMS0001CN

. / [AC1] [] 09 L 3 (3 ) [P1AH][n1AH] [P1dH][n1dH] [] 1 () -34No.PF-OMS0001CN-A (6 ) [P1AL][n1AL] [P1dL][n1dL] [] 1 OUT1 [CoL] [] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMS0001CN-A d.

HRX-OM-Q026

(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

HRX-OM-W032

(IEC 60417-5032-1) How to see the serial number W Z 001 December 2018 W Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2018 W Repeated from A to Z in alphabetic al order 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2019 X 2 P 2020 y 3 Q Fig. 1-1 Position of the product label HRS Series 1.4 Product Label 1-3 HRX-OM-W032 Chapter 1 Safety Instructions

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Double side square Z Double side key Y Shaft type Bolt Double side round K Single side key Single shaft S Single side round T Single side square X B port A port A port B port Shaft pattern Vane Body end surface on short shaft side Rotation pattern Note) Consult P/A regarding order made specifications.

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 09 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-Sub Connector on U Side, Stations: 09 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Stations: 09, Systems, Port Combinations: A [Ejector System, ø8 (Common PV)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 09, Systems, Port Combinations: A [Ejector System, ø8 (Common PV)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Specification)

Stations: 09, Systems, Port Combinations: A [Ejector System, ø8 (Common PV)], Exhaust: 1 (Complex Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 09, Systems, Port Combinations: A [Ejector System, ø8 (Common PV)], Exhaust: 1 (Complex Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Specification)

Stations: 09, Systems, Port Combinations: A [Ejector System, ø8 (Common PV)], Exhaust: 1 (Complex Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option

Stations: 09, Systems, Port Combinations: A [Ejector System, ø8 (Common PV)], Exhaust: 1 (Complex Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: L (Manifold Individual Supply Specification)

Stations: 09, Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: L (Manifold Individual Supply Specification)

Stations: 09, Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 09, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: F (D-sub Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 09, Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 09, Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 1 (Complex Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 09, Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 1 (Complex Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: L (Manifold Individual Supply Specification)

Stations: 09, Systems, Port Combinations: AN [Ejector System, ø5/16" (Common PV)], Exhaust: 1 (Complex Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Specification)