Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

) P. 1 + SYJ5000 Body ported Base mounted 0.47 4/2 5/3 (A/B EA/EB) With light/ surge voltage suppressor L plug connector { } P. 23 + SYJ7000 2 Position Single 2.4 4/2 5/3 (A/B EA/EB) Double { } M plug connector + For AC P. 47 Non-locking push type SYJ3000 3 Position 100 VAC / Hz 110 VAC / Hz 200 VAC / Hz 220 VAC / Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { }

VFRA3000

: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

Direct Solenoid

Normally this manilold arangeme is usd for Single prossurQ four way vaMs circuilry where pres$re is applied to the (P) common gallery and exhausts through th dual (EA & EB) common galleris.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

CL

SMC if the fine lock-up unit must be disassembled. 3.1-54 Lock-up Cylinder/Double Acting Single Rod Series CL1 Basic/(B) A Lock-up at piston forward B Lock-up at piston backward 40 to 100 With rod boot CL MLGC CNA CB CV/MVG CXW 125 to 160 CXS CXT With rod boot MX MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 BY C EA K D BX J KA BP EB

Air Pilot Operated Series NVSA

A common Pressure Gallsry (P) and two common Exheusl Gall6rle3 (EA & EB) Interconnect wlth lha p(seur6 and Bxhausl ports of all ihs valve wlthin the a$smbly. Prg38ur6 and Exhausi sMca connectlona ar locatod at eithor 6od of the manlfold.

7.4

Manifold Flow Rate Characteristics Port size Flow rate characteristics 1R4/2 (PRA/B) 4/2R5/3 (A/BREA/EB) Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] Cv C [dm3/(sbar)] Cv SS0752-C 1/8 C4 2.6 0.71 2.7 0.75 SS0755-CC 1/8 C4 2.1 0.58 1.9 0.53 SS0755-VC M5 thread V4 0.86 0.24 0.86 0.24 When 5-station single solenoids are operated simultaneously. 740 Valve Specifications S0700 Series

VQ7-6/7-8

63 PE PE PA B 80.5 (50) 63 P PE PE P R1 R2 R1 R2 EA EB EB EA A A Dimensions inside ( ) are for sub plate apertures Rc3/8 and 1/2 Dimensions inside are for sub plate aperture Rc3/4 Dimensions inside ( ) are for sub plate apertures Rc3/8 and 1/2 Dimensions inside are for sub plate aperture Rc3/4 28 Series VQ7-8 Manifold Options Individual EXH spacer VV72-R-03, 04 Individual SUP spacer VV72

Slider Type/Ball Bushing Bearing

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10

NCA1

t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod * C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact SMC Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB

CQM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IB RQ IA 2-N through MU T EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2 x 2-RA L M Flat washer Data W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Bore size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Support Block Model LEYG S 025 Size 025 For size 25 032 For size 32 Support block Support block Body mounting screw EB X 2 x OA thread depth OB 2 x G through ST (0.5) GA WC + Stroke Caution Do not install the body using only a support block. The support block should be used only for support.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

15

Dimensions: In-line Motor LEYG25, 32 Rod operating range Note) 4 x OA through 2 x FA thread depth FB FD depth FE FC Section XX1 (Stroke + 4 mm) Motor Motor flange EV S Q U H GA LEF J Y (EB) FG EH T EB X LEJ C EC ED 0.5 XA H9 depth XA LEL B + Stroke FF LEM L + Stroke Section XX1 4 x OA thread depth OB Bottom hole G through XA H9 depth XA DB LEY XAH9 2 x NA thread depth NC LES DA X C EC ED

2–4

Standard without auto switch: 12 and 16; 5 stroke, 25; 5 to 10 stroke Built-in magnet with auto switch: 20; 5 stroke 6 Series CQM Dimensions 32 to 50 2-HA through Auto switch 2-P 2-HB through V KA F Q U 2 x 2-OB counterbore with depth RB 2-N through IB IA EA EB EC M 22 Z 11 Min. lead wire bending radius 10 (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2

VQ4000

) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port size: Rc 3/8 Manifold Option Refer to pages 2-5-34 to 2-5-38 for detail dimensions of each option.

Air Cylinder NCA1 Series

t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod * C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact P/A Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB

Multistage Ejector (N)ZL Series

1MPa = 145 psi 1kPa = 0.145 psi Pmax Vacuum pressure P1 Qmax Q1 Suction flow rate 3 Series (N)ZL Multistage Ejector How to Order N ZL1 12 K1 12 25 5 M Z E With valve Without valve N ZL1 Fitting Size Lead wire length Air Supply Port Vacuum Port 6 12 1/4" 1/2" Nil N 0.5m 2.9m Nil L 1.2mm 12 Nozzle diameter Digital vacuum pressure switch specifications Exhaust specifications For E (ZSE4) EB