Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0!2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21 M 20 Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60

Stopper Cylinder

across flats K T 0 0.1 E W M D E 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke A + 2 stroke B + Stroke V H + Stroke Width across flats K T 0 0.1 Y M Q F D E A + 2 stroke B + Stroke V H + Stroke Width across flats K M T 0 0.1 D E 2 x P (Rc, NPT, G) A + 2 stroke B + Stroke V H + Stroke Width across flats K M Q F Z Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.

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40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.

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40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.

VQ5000

VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

TA/TB Sectional View With Rod Boot Built-in One-touch Fittings Air-hydro Bore size (mm) Bore size (mm) l TC TDH9 TF TG e f TE h IJ JH JW ZZ (14.5) (11.5) 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 +0.08 0 +0.08 0 +0.08 0 +0.08 0 +0.08 0 +0.08 0 M5 x 0.8 M6 x 0.75 M8 x 1.0 30 30 35 35 40 40 52 62 126(134) 133(141) 135(143) 150(159) 170(182) 170(182) 191(205) 191(205) 55 62 62 70 78

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

S + Stroke NA F NA FT F A H FZ FX A 2 x FC Mounting hole C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0 !

10

0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 125 16 16 12 12 12.5 12.5 17.5 17.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Applicable solenoid valves: Series 10-SY3 0, 10-SY5 0, 10-SY7 0, 10-SY9 0 2 4 6 2 4 6 2 4 6 2 4 20 40 45 60 3 5 7 9 X90 10 SY Model no. Entry is the same as standard products. Specifications and performance are the same as standard products.

C76

I Dh -X 20Data (mm) AM 20 24 C 12 14 FA G H HR K KA KK KV 38 50 TDH9 TW 34.5 42.5 BE D 37.5 46.5 Eh8 EE KW 7 8 N 17 22 NB 34.5 42.5 WH 38 45 XB 47 57 ZZ 126 158 S 68 89 SW 17 19 TC M8 x 1 Bore +0.036 0 10 +0.043 0 12 30 0 0.033 32 40 M30 x 1.5 G 1/8 30 58 23.8 10 9 12.2 M10 x 1.5 38 0 0.039 M10 x 1 M38 x 1.5 G 1/4 35 69 28.3 12 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1

C76

I Dh -X 20Data (mm) AM 20 24 C 12 14 FA G H HR K KA KK KV 38 50 TDH9 TW 34.5 42.5 BE D 37.5 46.5 KW 7 8 WH 38 45 Eh8 EE N 17 22 XB 47 57 NB 34.5 42.5 ZZ 126 158 S 68 89 SW 17 19 TC M8 x 1 Bore +0.036 0 10 +0.043 0 12 30 0 0.033 32 40 M30 x 1.5 G 1/8 30 58 23.8 10 9 12.2 M10 x 1.5 38 0 0.039 M38 x 1.5 G 1/4 35 69 28.3 12 M10 x 1 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1

New

0.21 0 to 430 0 to 3 430 103 to 0.1 to 1/8 3.2 1.12 0.51 0.35 0 to 180 0 to 1.2 1/8, 1/4, 2 VXN24 Atmospheric 430 Atmospheric 3/8 460 5/32 4 1.56 0.57 0.52 0 to 140 0 to 1 pressure pressure 7/32 5.6 2.29 0.55 0.73 0 to 50 0 to 0.35 1/8 3.2 1.19 0.47 0.35 0 to 430 0 to 3 560 1/8, 1/4, 3 VXN34 570 590 5/32 4 1.71 0.50 0.52 0 to 300 0 to 2.1 3/8 7/32 5.6 3.14 0.47 0.88 0 to 130 0 to 0.9 Note

NCA1

3/8 1.3 1.06 2.19 1 1.75 3 3/4 2.48 4 7/8 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 1.18 2.76 1 3/8 2.34 4 1/4 2.72 5 53/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.18 3.32 1 3/8 2.34 4 1/4 2.72 5 53/64 Foot Mounting Type NC A1L (MS1 Mounting Style) (in) Bore (in) MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y

Series IDG

Performance Charts IDG60S IDG75S 0 0 10 10 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa P1 = 0.3MPa 20 20 30 30 P1 = 0.5MPa P1 = 0.5MPa 40 40 50 50 P1 = 0.7MPa P1 = 0.7MPa 60 60 70 70 20 80 80 40 80 120 160 40 60 80 0 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG100S Note: F = (C x 1.8) + 32 0 1MPa = 145psi 10

HRX-OM-S004

(2/4) Alarm operations Alarm threshold and others A.RUN P.RUN A.STP Code Alarm name OFF Display Default setting Settable range Display Set temperature 1.0oC (33.8 o F) (-)5 1.034.0 oC (33.893.2 o F) Monitoring method Circulating fluid drop 0 03 AL04 discharge temp.

REA/REB

M1 = F x L Port side A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REAH10 REAH10 REAH10 Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.5 2.5 0 0.5 1.5 0 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 1.0 Moment (Nm) Moment (Nm) REAH15, 20,