MXQ

Retraction End (mm) Stroke adjustment range (mm) B C F G H J K 1) E D A Applicable size Model MXQ-AT6(L) 5 16.5 MXQ6(L) 17.5 19 10.5 6 8 7 2.5 M5 x 0.8 M2.5 x 6 MXQ-AT6(L)-X11 15 26.5 MXQ-AT8(L) 5 19.5 MXQ8(L) 21 22 12.5 8 10 8 3 M6 x 1 M3 x 8 MXQ-AT8(L)-X11 15 29.5 D H E MXQ-AT8(L)-X12 25 39.5 F MXQ-AT12(L) 5 23.5 MXQ12(L) M8 x 1 M4 x 10 28 29 16 16 10 12 4 MXQ-AT12(L)-X11 15 33.5 G MXQ-AT12

42

) port SMC VQC 1/2 VQC 4/5 37 41 50 98 PE X 18 31.5 VQZ 26.5 P R1 R2 16 27.5 41 41 27.5 SQ 1/8" External pilot port 1/8" PE. port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port VFS VFR 2-position double: VQ525 0 1-l G H 3-position closed center: VQ535 0 1-l G H 3-position exhaust center: VQ545 0 1-l G H 3-position pressure center: VQ5550 1-l G H 3-position double check: VQ565 0 1-l G H VQ7 194.5

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

H Grommet (G), (H): SYJ3140-l ll-M5 5 10 SY 33.5 Manual override 2-3.2 22 4 SYJ Depress and turn to operate and lock override.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated. Kit/Electrical entry/Cable length F Kit (Flat cable connector) P Kit (Flat cable connector with power supply terminal block) G Kit (D-sub connector) Compatible only with 24VDC valves.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Possible to transfer a workpiece at low-speed.

End of rotation Rotation starting point 5 5 5 5 5 e R g ot n End of rotation B ra at n io n io ra at n ot 5 g e R A B R o 5 t a 5 ti o n B r Rotation starting point a End of rotation n g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

KJ

, M6> <M5, M6> Weight (g) Model tubing O.D.

Compact 5-Port Solenoid Valve

For EX600/EX250 pp. 63, 77, 119 1 3 5 S6 S JJ5SY 10 G P, E port entry, SUP/EXH block assembly P, E port entry External pilot U side (2 to 10 stations) G D side (2 to 10 stations) H Both sides (2 to 24 stations) J How to Order Valves JSY T 0 0 5 1 R 3 5 R JSY 0 0 5 Coil type (See below.)

Series SV

D G D SI unit SI unit Master unit D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V L2 L1 G Power supply 24V 0V LINE1 LINE2 SHIELD L1 L2 0V 24V Transmission lines SHIELD SHIELD L1 L2 FG 24V 0V L1 L2 FG 24V 0V Black White Brown Blue Terminal resistor Main transmission line Transmission lines Crimped connector SL-J1A Power supply 24V 0V Class 3 ground Class 3 ground 0V 24V G D G D Power supply 24V

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VM

Push button (Mushroom) VM122-M5-30R/B/G/Y VM132-M5-30R/B/G/Y Panel mounting hole JIS Symbol 2 port 3 port 2-M5 x 0.8 depth 4 R port (3 port only) 0.5 MPa supply 4.9 mm P.T. 21 N F.O.F. 1.6 mm O.T. 2-4.6 mounting hole 6.5 mm T.T.

Electric Actuator with Integrated Guide

Driver How to order Non-standard motor electric actuators LJ1 and LG1 G LJ1 Compatible model 7 G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yasukawa Electric Corporation How to order Applicable types LTF (non-standard motor) G LJ1 05 Compatible model 1 B Model Manufacturer part no.

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

MGP

24 110 110 120 120 M5 X 0.8 10 10 12 12 40 44 44 44 300 300 3 3 3 4 5 5 17 17 56 62 81 91 15 17 29 29 3.5 3.5 3.5 4.5 25 27 39 39 41 46 54 64 50 56 72 82 12 16 20 25 37 38 44 50 CY1 16 M5 X 0.8 18 167 167 M6 X 1.0 MY1 26 M6 X 1.0 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Dimensions A, DB, E A E DB A E DB Bore (mm) 100st< 50st< 100st 50st< 100st Bore (mm) 100st< 30st

I

T h e V YH y R e g R a n g e i s c o n s t r u c t e d b y u t i l i z i n g a standard control unit either alone (VY1D00-M5) or as a Pilot Valve controlling one of the Range of VEX1 Power Valves.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

E 4 A 3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

R port 1/8 P port 1/8 Stations P, R port thread type A port size 02 : 20 2 Stations : 20 Stations A A M5 01 M5 x 0.8 1/8 Nil Rc G NPT NPTF CE-compliant F N T A port M5 x 0.8, 1/8 Nil Q CE-compliant Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5