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The control opening becomes closed when the solenoid's pulling force (F1) balances with the force (F2), which is created by the outlet pressure (P2) that passes through the feedback passage and acts on the spool surface. As a result, the outlet pressure (P2) is established.

P2 Time (Operating principle) At the point when the primary pressure fluctuates, the set pressure value is compensated by setting the auto shift input (external input) to low (no-voltage) input, using the pressure measured at that point as a standard.

Normal primary pressure Drop of primary pressure Increase of primary pressure Pressure P1 P2 Time Switch output 1, 2 ON OFF Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com The correction value is not stored on the EEPROM.

The air pressure forms a bridge circuit inside the unit with a vacuum applied to the circuit, but with the adsorption nozzle S4 open, adjust needle S2 so that (P1 P2). When parts are absorbed by nozzle S4, the resulting (P2 P1) differential will be detected by the pressure sensor.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA 12(P1): Pilot SUP port 10(P2): Pilot EXH port VN Easy maintenance Parts can be exchanged without removing the existing main piping Two seal materials LVC NBR/FKM LVA LVH 1(P) port 2(A) port Series LVD Operating fluid pressure Port size Rc Port

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9 10 Series VCW Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Cylinder side pressure (P2) (P2) IN IN SY OUT OUT Specifications Max. operating pressure Min. operating pressure Ambient and fluid temp.

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

Port Connections P1 = 1/4 Main In/Out NPT Ports P2 = 3/8 Main In/Out NPT Ports 1 Liter Liquid Canister Pressure Range: 29.92 Hg-125 PSI 1/2 Liter Liquid Canister COAST PNEUMATICS, INC. :: 8055 E. CRYSTAL DR :: ANAHEIM CA 92807 :: PHONE: 714.921.2255 :: FAX: 714.921.9955 :: WWW.COASTPNEUMATICS.COM

As a guide, adjust P2, so that it could be W + P2A = P0a.

Example) Lead wire length 2000 mm Electrical entry When ordering cylinder with valve CVQM32-30-M9B-5MOZ SY100-30-4A-20 M-type plug connector with lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB

Cylinder side pressure (P2) Specifications Max. operating pressure Min. operating pressure Ambient and fluid temp.

= 0.5 MPa 1(P) 2(B) 9.0 12.8 11.8 13.1 4(A) 5(R1) 21.3 21.4 14.4 13.1 Effective area at exhaust side (mm2) P2 = 0.5 MPa 2(B) 3(R2) 18.2 14.9 14.8 12.2 Note 1) Set the pressure within operating pressure range of solenoid valve.

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.