Precision Clean Regulator

2 1 Body Stainless steel 316L 2 Valve guide Stainless steel 316 ARM 3 Spacer PPS e !1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

06-mgz-e

Grease pack part no.: GR-S-010 (10 g) 32 Piston gasket 33 #4 #5 #6 #7 #8 #9 $0 Tube rod gasket 30, 31, 32 and 33 are non-replaceable parts, so they are not included in the seal kit. Cylinder tube gasket NBR Locking piston seal A Locking piston seal B Locking piston seal C Lock holder gasket Port block gasket Pipe gasket 138

44

26.0 27.5 27.9 28 29.5 13 17 13 17 22 26 31 35 38 58 61 71 70 74 83 1/8" (3.18) 0.086" (2.18) 2 10 8 13.5 5 1.5 LQ L1 M L1 M 0.098" (2.5) 5/32" (4) 3 10 8 13.5 5 1.8 d MQR 1/4" (6.35) 5/32" (3.95) 10 10 12 15.2 6 3.3 A L2 T H2 16 H2 0.236" (6) 5/16" (8) 12 14 17.4 6.6 5.3 25 H1 IDK Connection thread 18 3/8" (9.53) 1/4" (6.35) 15 17 20.4 7.6 5.6 28 2 x Applicable tubing 36 1/2" (12.7) 3/8

HEC-OM-S008

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR 4.2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

20.0

Extension Press for 6sec POWER PEAK / BOTTOM MODE Display Ground terminal BATTERY 1.5V x 2 LR6 G MADE IN JAPAN kV POWER LIGHT Battery LOW L LIGHT button Backlight ON/OFF POWER button Power ON/OFF Mode switching LR6 dry cell battery (2 pcs.)

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

TUS Series Soft Polyurethane Flat Tubing Multi-core, Multi-color Specification

MQR Symbol O.D. x I.D. 0425 4 x 2.5 0604 6 x 4 0805 8 x 5 1065 10 x 6.5 1208 12 x 8 Symbol Number of cores X169 2 cores X170 3 cores X171 4 cores X172 5 cores T T IDK Tube length per roll [m] Color*1 Symbol Length A 1 B 2 C 3 D 4 E 5 F 10 G 20 Symbol Color Symbol Color 1 Black 5 Yellow 2 White 6 Green 3 Red 7 Translucent*2 4 Blue 8 Yellow brown Yellow Blue Red White Black Inside of the roll

Polyurethane Tubing TU/TIUB Series

(mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

10 L2 A 8 D1 KS KX 6 D2 18.5 10 10 21.8 12.8 10 H Connection threads 8 15.2 20.5 26 18 25.3 12 KM (R) (R) 2 x Applicable tubing 10 18.5 23 41 29 28.4 17 KF 17 L1 20.9 12 24 58 46 30.4 22 M D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

IDX-OM-W017

3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1

IDX-OM-O004C

. 8-1 9 K 9.1 . 9-1 9.2 . 9-1 10 L 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 M 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-2 12 R 12.1 . 12-1 12.2 . 12-1 12.3 . 12-1 12.4 . 12-2 12.5 . 12-3 13 S 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1

SFOD-OMT0012

The details of each indication are explained in (2-1) to (2-3) below. (2-1) Status of the connected actuators (2-2) I/O type (2-3) Status of input and output signals (2-1) Status of the connected actuators The status of the connected actuators is indicated.

IDX-OM-W032

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4

FEP Tubing (Fluoropolymer) Series TH

(mm) 4 4 6 8 10 10 12 12 Tubing I.D. (mm) 2 4 6 10 2.5 7.5 8 9 Color Symbol N Translucent R Red (Translucent) BU Blue (Translucent) B Black (Opaque) Inch nominal size Inch nominal size 5/32" 5/16" Specifications Air, Water Note 1), Inert gas Note 4) Fluid How to measure the minimum bending radius.