Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K2 [Supply Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm),

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm),

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K2 [Supply Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K2 [Supply Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K2 [Supply Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm),

SY3000-OMH0002

2) P 3) (2 ) 1 0.5MP 4) 5) AB (P AB )0.25MPa (PB PA)(Cv ) 14 No.SY3000-OMH0002 () (E) () () (PE) 15 No.SY3000-OMH0002 No. 1(ISO VG 32) (R) E 16 No.SY3000-OMH0002

MXQ

Symmetric type Port thread type Nil S n 6 to 16 M thread Rc NPT G Nil L Standard type Made to Order Nil Symmetric type Refer to page 93 for details.

Series LX Acceleration Time Guide

The graphs are based on operation using an P/A DC power input type driver with halfstep energization.

HRX-OM-Q033

Request message (Master to Slave) STX Slave Address Request Command ETX BCC [STX] XX XX [R] [L] [O] [C] [ETX] XX Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC [STX] XX XX [ACK] [L] [O] [C] XX XX XX XX XX [ETX] XX Communication example Slave AddressNo 1 BCC selection Your system This product (Request)STX01RLOC[ETX][12h] (Response)

HRX-OM-S010

Request message (Master to Slave) STX Slave Address Request Command ETX BCC [STX] XX XX [R] [L] [O] [C] [ETX] XX Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC [STX] XX XX [ACK] [L] [O] [C] XX XX XX XX XX [ETX] XX Communication example Slave AddressNo 1 BCC selection Your system This product (Request)STX01RLOC[ETX][12h] (Response)

Pressure Sensor Controller

Mounting by bracket Fix the bracket to the product with the set screws M3 x 5 L (2 pcs.) as attached. The tightening torque of the set screws must be 0.5 to 0.7 Nm. Mounting by panel mount adapter Fix the panel mount adapter to the product with the set screws M3 x 8 L (2 pcs.) as attached.

MHx-OMY0005

MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12-PS MHF12-PS MHF12-PS 202122 MHF2-D,D1(12,16,20)GR-S-010(10g) () MHF2-D2(12) GR-L-005(5g) () GR-S-010(10g) () MHF2-D2(16,20

ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

SRP

P-80 (YG)

SRP

P-80 (YG)

Air Slide Table Series MXP

GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

1

Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

AR425 to 935 Nil A B C D E F G H J K L M N O P Q R ARX AMR ARM ARM With pressure guage With digital pressure switch ARP IR-A Common supply block Common supply block with pressure switch IR L side L side IRV VEX Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.