Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

This value can be used for the selection of the power supply. *9 With lock only. *10 For an actuator with lock, add the power consumption for the lock.

Fieldbus system EtherNet/IP TM compatible SI unit

Disable Output will be held last state. 9 Output setting for communication idling 3 4 (Idle_MA) Enable Output will be user idle value. 2 Sets output per channel during communication idling.

EtherNet/IP TM Compatible Fieldbus System

No.EX-OMS0014-A PRODUCT NAME EtherNet/IPTM Compatible Fieldbus System MODEL / Series / Product Number EX500-GEN2 EX500-S103 EX500-DXP# Table of Contents Safety Instructions 3 Product Overview 9 System construction 9 EX500 GW unit Model Indication and How to Order 10 Summary of Product parts 10 Mounting and Installation 11 Installation 11 Wiring 12 LED Display 17 Setting of EtherNet/IPTM using

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Electric actuators / Common precautions . 9 2.1 Wiring/Cables . 9 2.2 Design/Selection . 10 2.3 Mounting . 11 2.4 Handling . 12 2.5 Operating Environment . 14 2.6 Maintenance . 15 2.7 Actuator with Lock . 15 2.8 Design/Selection . 16 2.9 Handling . 16 2.10 Mounting . 17 2.11 Power Supply . 18 2.12 Grounding . 18 2.13 Wiring . 18 2.14 Maintenance . 19 3.

Air cylinder

Note 3) The torque for tightening the hexagon socket head cap screw (M2.5 x 6L, M2.5 x 9 L) is 0.2 to 0.3 Nm.

VP300/500/700

162.2 Rc 3/8, 1/2 42 31 (Piping port) PE 9 : With light/surge voltage suppressor 3(R) 1(P) 3.5 DIN terminal (D, Y) M5 x 0.8 108.5 (PE port) Applicable cable O.D.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body sizes 2 to 10 stations (Standard) Common EXH, Individual EXH Side piping, Bottom piping Type E Type N Type V Manifold type SA

VP4

VZS VFS VS4 VQ7 EVS (1) VFN (4) (7) (5) (6) (3e) (3d) (3d) (3c) (3) (9) (3a) (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) DlN Terminal (Connection) Solenoid is wired with male thread terminals of DIN connector as follows. Connect with corresponding terminals of the connector.

Electro-Pneumatic Positioner

D. 7 to 9:P368010-26 Applicable cable O.

ZP

9 35 35 M18 x 1.5 M18 x 1.5 9 Width across flats 16 Rc 1/8 9 10 Width across flats 16 Rc 1/8 10 Hexagon width across flats 21 J Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-

180° Angular Style Air Gripper Series MHY2/MHW2

9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note Note No. q Description Material No. Description Material Body Bushing B !0 o Hard anodized Aluminum alloy Sintered alloy steel End plate Stainless steel 10: Stainless steel 16 to 25: Aluminum alloy Piston w 16 to 25: Chromated Bumper !

PF2A/PF2W

Up to 9 of flow rate value can be accumulated. Real-time switch output, accumulated switch output, or accumulated pulse output can be selected as an output type.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

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9!!9!

Process Pump

615 PAF Series Dimensions: Air Operated Type (PAF5000 Series) With nut (with LQ1 fittings): PAF5413S-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)

C92

9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190 215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115

VZ5000

main and pilot valve 3 position closed center Thread type 3 Nil Rc F N G PE port 3(R) port NPT T NPTF 3 position exhaust center 4 Rated voltage 4(A), 2(B) port size 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port: Rc 1/8 5 24 VDC 12 VDC 5 6 9

VS7-6

3 8 B03 Bottom piping SYJ R Wedge packing style 3 8 R port: N NPT Contact SMC for other voltages (9) Order Made Individual pilot EXH V FIG T NPTF FHG SX If specifying more than one symbol, indicate them in the alphabetical order.