Manifold Type: 20 (Body Ported, Bar Manifold, Individual Wiring), Valve Stations: 14 Stations, A, B Port: 00T (NPTF)
Manifold Type: 20 (Body Ported, Bar Manifold, Individual Wiring), Valve Stations: 18 Stations, A, B Port: 00T (NPTF)
Manifold Type: 20P (Body Ported, Flat Cable), Valve Stations: 8 Stations, A, B Port: 00T (NPTF)
Manifold Type: 20 (Body Ported), Valve Stations: 13 Stations, A, B Port: 00T (NPTF)
Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 12 Stations, A B Port Size: 00T (NPTF)
Manifold Type: 20 (Body Ported), Valve Stations: 18 Stations, A, B Port: 00T (NPTF)
Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 00T (NPTF)
Series: 3 (VQ30), Stations: 8 Stations, Option: None, Thread: 00T (NPTF3/8)
Manifold Type: 20P (Body Ported, Bar Manifold, Flat Cable), Valve Stations: 9 Stations, A, B Port: 00T (NPTF)
Manifold Type: 20 (Body Ported, Bar Manifold, Individual Wiring), Valve Stations: 13 Stations, A, B Port: 00T (NPTF)
Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: 20R (Body Ported), Stations: 4 Stations, A Port Size: None, P R Port Thread: 00T (NPTF)
Manifold Type: 30 (Top Ported Common EXH), Stations: 11 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)
Model: 52R (Top Ported, External Pilot), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Stations: 8 Stations, P,E Port Entry: D (D Side), Thread: 00T (NPTF)
Manifold Type: 30 (Top Ported Common EXH), Stations: 9 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 2) Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface. Maintenance and inspection will be facilitated. 3) Air is normally released from the bleed hole.
The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).
The piston rod moves to the position corresponding to the input current value of sig-in+ and sin-in-. *2 Perform calibration once again for correcting the set point. 21 Revision history 1st edition: October 2019 Rev.
VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .
) (11) (22) (12) (13) (14) (15) 10 VEX-OMV0001 P2 (22) (16) (12) (22) (17) () (18) (19) 3(R) (3) (6) (4) (20) 2(A) (22) (21) 11 VEX-OMV0001 No
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings