EXxx-OMV0028.eng

4 0 V (Output) 4 0 V (Output) Boschring 13-15, 63329 Egelsbach, Germany Not used 5 (4) EX600-ED5-# PWR IN: M12 4-pin Plug, A-code GREECE (30) 210 271 7265 PWR OUT: M12 5-pin Socket, A-code Red LED flashes.

LFE-OMZ0012

0 0 5 10 15 20 0 20 40 60 80 100 Flow rate [L/min] Flow rate [L/min] LFE3 0.02 Pressure loss [MPa] 0.015 0.01 0.005 0 0 50 100 150 200 Flow rate [L/min] -26No.LFE*-OMZ0012 Straight pipe length (reference value) Straight pipe length Straight pipe length Change of accuracy [%F.S.]

PAB-OM-B007-B

C alculation of diaphragm life (varying w ith applications) 0 .1 0 0 liter(discharge amount per one cycle)5 0 million cyclesreferential life cycle Referential life date F low (/minx operating time per dayhourx 6 0 min. C onnecting port C orrect tightening torque(N) Rc(PT )1 /4 Metal 1 2 1 4 Rc(PT )1 /2 Metal 2 8 3 0 Rc(PT )3 /4 Metal 2 8 3 0 2 . Installation

HRX-OM-M005

Alarm is disabled if the selection is 0. 6 LOW FLOW 10LPM [SET] key Used to display the Ten-key screen on page 5-9, which allows numerical input and setting. The CH1(2) setting data screen 1, 2 are alternately displayed. The CH1(2) setting data screen 3 on page 5-8 is also displayed if the optional DI control kit is provided.

SI unit for PROFINET

Designation Description 1 SV24 V +24 V for solenoid valve 2 SV0 V 0 V for solenoid valve 3 SI24 V +24 V for SI unit operation 4 SI0 V 0 V for SI unit operation 5 Unused The M12 connector cable has two types, SPEEDCON compatible and non-compatible.

Pressure Sensor for General Fluids

PSE560 PSE561 PSE563 PSE564 Rated pressure range 0 to 1 MPa 0 to -101 kPa -100 to 100 kPa 0 to 500 kPa Extension analogue output range -0.1 to 0 MPa 10.1 to 0 kPa -50 to 0 kPa Withstand pressure 1.5 MPa 500 kPa 500 kPa 750 kPa Model No.

SI unit for CC-Link

Communication speed setting Setting Communication speed 0 156 kbps 1 625 kbps 2 2.5 Mbps 3 5 Mbps 4 10 Mbps : The communication speed should be set within the range of 0 to 4. If the setting is out of range, the L ERR LED will turn on.

Fieldbus Device Handheld Terminal

SI Unit Updates from valve output 0 every 30 seconds.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Turn the manual override to the left and line up the arrow ( ) with 0 to return it to the RESET state (flow from A to P).(It is set to RESET state when shipped.) 26 - Doc. no.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (5) Pressure Sensor/Pressure Switch for Vacuum Symbol Type Pressure range [kPa] Specifications P Pressure sensor Note 10) 0 to -101 Analog output 1 to 5V T -100 to 100 Analog output 1 to 5V A Unit selection function Note 12) NPN 2 outputs B SI unit only Note 13) 0 to -101 C PNP Unit selection function Note 12) 2 outputs D SI unit only Note 13) Pressure switch for vacuum E Unit

Digital Gap Checker

ISA3-H Piping length: 1m, 3m, 5m : When the display value becomes 29 or lower, "0" is displayed. "0" and "30" are displayed near "30".

Mini Rotary Actuator

Specifications 05 1 Size Basic type With external stopper Basic type With external stopper Fluid Air(Non-lube) Maximum operating pressure 0.7 MPa Minimum operating pressure 0.15 MPa Ambient and fluid temperature 060No freezing 8 10 8 10 100 , 90 90,180 100 , 90 90,180 0 0 0 0 Rotation angle 8 10 8 10 190 , 180 190 , 180 0 0 0 0 Angle adjustment range Each rotation end 5 Each rotation end

3-Position Rotary Table

3 @0 !7 @5 !1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

Clean Gas Filter

ID IDG Connection IDK Symbol Connection (IN, OUT) 0 1 2 3 Rc NPT TSJ UOJ AMG AFF SFA302 AM AMD SFA103 Model SFA200 AMH Model Rated flow rate L/min (ANR) Note 1) Element part no.

CY1F

3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15 CY1F15 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 105 RB0805X552 CY1F25 CY1F25 Rc1/8 +0.012 0 NPT1/8 G1/8 5 1 5 9.5 depth 5.4 7.5 5.5 140 RB1006X552 Note 1) When adjusting the stroke, keep the T dimension within a 0 to 2 mm range.

ML1

Refer to p.0-44 to 0-46 for common precautions of auto switch.

3 Port Solenoid Valve Series VQ100 1

AXT661-12 VG Lead wire VP 0 1 0 1 0.2 to 0.33 mm2 (Max. cover diameter: 1.7 mm) Lever Convex part Hook ON OFF S070 If the manual override is turned clockwise and the mark is adjusted to 1, it will be locked in the ON state. If the manual override is turned, counterclockwise and mark is adjusted to 0, locking will be released and the manual override will return. Socket Part no.

VQC

Number of input blocks (Fill out for I/O unit only) Input block type (Fill out for I/O unit only) Nil Without SI unit/input block (SD0) Without input block With 1 input block Nil Without input block M12, 2 inputs M12, 4 inputs M8, 4 inputs (3 pins) 0 1 1 2 3 8 With 8 input blocks 2-2-15 How to Order Valves VQC 2 1 0 5 0 Series 2 VQC2000 Manual override Nil: Non-locking push type (Slotted

Compact Cylinder/Guide Rod Type Series CQM

3 26.5 17 31.5 22 25 24 5 M3 x 0.5 M4 x 0.7 32 31.5 5 to 30 +0.2 0 3 5 to 30 26.5 17 31.5 22 29 28 5 M3 x 0.5 M4 x 0.7 38 37 +0.2 0 5 to 50 4 32 19.5 42 29.5 36 34 5.5 M4 x 0.7 M6 x 1.0 47 45.5 +0.2 0 5 to 50 5 35.5 22.5 45.5 32.5 40 38 5.5 M5 x 0.8 M6 x 1.0 52 50.5 Bore size (mm) KB L M N OB Q RA RB T V W KA 12 16 20 25 10 0.1 7.1 3.5 15.5 3.5 6.5 7.5 7 4 0.5 14.9 6 14 0.1 9.9 3.5 20 3.5

Toggle Type Air Gripper

0 !1 Component Parts No.