LMU100/200 Series Mist Spray Unit

T0604 (6 tube) applicable T0425 (4 tube) applicable T0806 (8 tube) applicable AIR OIL AIR BLOW Port size LMV110 How to Order LMV 0 1 1 20 Nozzle tubing length: L Air blow circuit Nozzle tubing construction 20 25 30 35 200 mm 250 mm 300 mm 350 mm LMV220 1 2 Flexible tubing Copper tubing Mixing valve 1 2 Available Not available Construction Dimensions LMV10/With air blow circuit LMV10L 45 41

08-ca2wh-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 41

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

Floating Joint

Reduction of length when using JT and JCM Max. 77 mm Product length Reduction when using JT Overall Length Comparison JT Series New New Size JA + CM2 Series New NewJT + JCM Series Reduction rate Workpiece 20 139.5 mm 90.2 mm 35% 32 149.0 mm 96.0 mm 36% 40 189.0 mm 112.0 mm 41% Cylinder (JCM) Weight Comparison JA Series Size JA + CM2 Series New NewJT + JCM Series Reduction rate 20 190 g 102

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

Fieldbus System

Nil No End Plate Power supply with M12 connector (Max. supplied current 2 A) Power supply with 7/8 inch connector (Max. supplied current 8 A) 2 3 Note) Without SI Unit, the symbol is nil. 41 For Series EX600 Series VQC2000 How to Order Valves VQC 1 0 5 1 0 2 Series VQC2000 Manual override Nil: Non-locking push type (Tool required) Type of actuation 2-position single 4-position dual 3-port

Fluoropolymer Tubing Variations

Fittings KF series Stainless Steel 316 Insert Fittings KFG series Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ series H/DL L/LL Applicable fittings Note 2) Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) KC 20C 100C 200C 260C 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75 41

HRL

CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin, PP, PBT, POM, PU, PVC, PPS, AS, PS, EPDM, NBR, Ion replacement resin Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Earth leakage breaker Rated current [A] 30 40 50 Electrical system Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41

Lightweight and Compact

Environmental friendly as refrigerant R410A Convenient functions Self diagnosis function and check display Page 70 Page 71 Timer operation function/Unit conversion function/Power failure auto-restart function/Anti-freezing operation function 41 types of alarm codes Communication function Page 71 Easy maintenance Page 69 Equipped with serial communication (RS232C/RS485) and contact I/Os (2

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

adjustment rangeOutlet air set pressure rangeOutlet air set temperatureOutlet air pressure dew pointOutlet air temperature stabilityOutlet air temperature display accuracyPower supply Note 4)Operating currentEarth leakage breaker capacityCompressor inputHeater inputNominal filtration ratingCleanliness of the filter outlet sideIDH4-20Compressed air3.5 to 17.6 scfm (100 to 500 L/min [ANR])41

adjustment rangeOutlet air set pressure rangeOutlet air set temperatureOutlet air pressure dew pointOutlet air temperature stabilityOutlet air temperature display accuracyPower supply Note 4)Operating currentEarth leakage breaker capacityCompressor inputHeater inputNominal filtration ratingCleanliness of the filter outlet sideIDHA6-23Compressed air7.1 to 28.3 scfm (200 to 800 L/min [ANR])41

0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, SYJ3000 valve, 4/5 PORT SOLENOID VALVE, 41 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, SYJ3000 valve, 4/5 PORT SOLENOID VALVE, 41 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, SYJ3000 valve, 4/5 PORT SOLENOID VALVE, 41 lb