E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Adjuster for series 11-MXP6 is available for one side only. Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Clean Series 11 Standard model no. MXJ Clean Series 11: Vacuum type External dimensions are identical to the standard model.

IDX-OM-W093

R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90

Air preparation filter

Application 11 3. Specifications 11 4. How to Order 12 5. Component name and spare parts list 13 6. Troubleshooting 14 7. Assembly and replacement procedure 7-1. Bracket assembly 15 7-2. Auto drain replacement 15 7-3. Element replacement 19 8. Dimensions 20 -2- Doc. no.

High-precision Digital Pressure Switch ( compatible)

The display accuracy Refer to Trouble No.11 does not meet the specifications. The Display Refer to Trouble No.12 measurement unit cannot be changed. Buttons do not work. Refer to Trouble No.13 Refer to Trouble No.14 -75No.PS-OMY0007-A Troubleshooting list Problem No.

Free-Mounting Cylinder with Air Cushion Series CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Rotary Gripper Series MRHQ

closed Finger closing port 5 0 0.1 4-M2.5 x 0.45 (mounting screw attachment ) 3 Max. 6.1 4-M4 x 0.7 5.7 12 2.5 Depth 6 (two on opposite side) 34 63 22.5 M5 x 0.8 Finger opening port 5 2 11.5 3-R1.5 23 18 11 25 15.5 41.5 4.5 33 Angle adjustment bolt 2-8 Depth of counter bore 2.5 3-R1.5 11 2-4.5 through 2 3-3H9 + 0.025 0 Depth 4 (one each on three sides) 10 3-3H9 long groove depth 3 + 0.025

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399

High-precision Digital Pressure Switch

The display accuracy Refer to Trouble No.11 does not meet the specifications. The Display Refer to Trouble No.12 measurement unit cannot be changed. Buttons do not work. Refer to Trouble No.13 Refer to Trouble No.14 -78No.PS-OMV0009-E Troubleshooting list Problem No.

212

] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60] 6.6 [25] 0.00 0 0.1 [0.5] 0.3 [1] 0.4 [1.5] 0.5 [2] 0.8 [3] 0.9 [3.5] 1.1 [4] 1.2 [4.5] 1.3 [5] 0.7 [2.5] Flow rate gal/min [L/min] Flow rate gal/min [

MHx-OMY0005

No.MH*-OMY0005 // MHF2-8D MHF2-12D MHF2-16D MHF2-20D 1. . 4 2 . 5 2-1 . 5 2-2. . 5 2-3 . 6 2-4. . 10 2-5 . 11 2-6. . 11 2-7. . 11 3 . 11 3-1. . 11 3-2. 1 . 12 3-2. 2 . 13 3-3. 1. 14 3-3. 2 . 15 3-4. /1 . 16 3-4. /2 . 17 1 *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems

IDX-OM-W094

R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Fieldbus system (PROFIBUS DP compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

HRX-OM-R039

Check of the accumulated operation time 11. Press the [SEL] key once. The accumulated operation time is displayed on the digital display. PV SV Displays the accumulated operation time. Refer to Table 5.4-2 for the display.

VG342 Series

Wiring 1) Pass them through the cable (7) in the order of cable ground (4), washer (5), rubber seal (6), and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11). Note 1) Tighten within the tightening torque of 0.5 Nm +/-15%.

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

29 D9h9 0 0.036 2-4.2 209.6 4.7 32 1 4.7 3 2-3 10 (35) 8 15.5 13.4 2 2 8 0.05 0 3 0 0.02 3 0 0.02 Open: 16 Closed: 10 Dimensional Differences between MHR and MDHR Regardless of auto switch installation, some body dimensions are different. 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) A 12 12 B A 5 4.7 B 14.5 14.5 15.5 15.5 Model -10R -10E -10R -10E MHR2 MDHR2 4 4 4 4 12-5-11