20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
Otherwise, chattering will occur. *9 When using a product with an analog output *10 When selecting 0 to 10 V, refer to the analog output graph for the allowable load current. *11 Standard condition (STD): 20 [C], 101.3 [kPa] (Absolute pressure), 65 [% RH] (The flow rate given in the specifications is the value under standard conditions.)
"Line name communication data" Value (16 decimal 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) 7 seg Display digit 11 seg Value (16 decimal 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) 7 seg Display digit 11 seg Value (16 decimal 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F number) 7 seg Display digit 11 seg Remark The value of cannot be displayed -105No.PS-OMW0009
LD LH LS LT LX LZ MM N NA NB NC 20 to 800 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm)
Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable
Hs A Auto switch mounting height mm Proper auto switch mounting positions mm D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9V D-F9WV D-F9BAL D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 25 22 25 9.5 3 13.5 7 12.5 6 24.5 27 24 20 32 11 5.5 15 9.5 14 8.5 27 29 26.5 25 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 32 50 17 7 21 11 20 10 36.5 38.5 36 40 17 12.5 21 16.5 20 15.5
(Display item), Set value (Threshold value) Sub screen Set value (Threshold value) Hysteresis value Visualization of settings Peak value Bottom value Delay time Piping Applicable fluid Series Output type Enclosure Copy function 1/4 (R, NPT, G) (URJ1/TSJ2) M5 female thread 1/8 (R, NPT) ZSE20(F)/ ISE20 1 output IP40 p. 9 ZSE20A(F)/ ISE20A 2 outputs Analog output (Voltage/Current) IP40 p. 11
(for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.
Note) The tightening torque for the hexagon socket head cap screw (M2.5 x 11 L) is 0.2 to 0.3 Nm. The tightening torque for the hexagon socket head cap screw (M3 x 4 L) is 0.5 to 0.7 Nm. qRemove the set screw attached to the auto switch.
12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.
4 4.5 D-A9/ A9V 7 7.5 8.5 9.5 9.5 10.5 D-Z7/ Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/ A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/ A44 9 9 10 11 11 11 * Values which include hysteresis are for guideline purposes only, they are not a 27 - 28 - Auto switch proper mounting position (detection at stroke end) and its mounting height Models with rubber bumper have different dimensions for auto
6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.
Then, Sending completed [IN: 19.0]changes from 1 to 0. 35 - 11.
No.1 2 =0 39 - 11. 11.1 [IN] Bit/Byte / Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 0 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 1 4 AREA bit 0,1 5 WAREA bit 0,1 ID1 6 ESTOP bit 0,1 7 ALARM bit 0,1 2 H 3 4 0.01mm 2147483647 4 5 L 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 H 11 4 0.01mm
Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.
Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper 14 Step motor (Servo / 24VDC) 11 - 3.
12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.