Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

HRX-OM-W038

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Recommended earth leakage breaker Model Power supply Sensitivity voltage Cable qty. x size Rated Rated of leak voltage current current [V] [A] [mA] 1-phase 200-230V AC (50/60Hz) 3 cores x12AWG HRS040-A-20 200, Recomm 230 20 30 Terminal (3 cores x3.5mm2) HRS040-W-20 block ended (including ground) screw crimp diameter terminal

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Nil With R3 3 RB 15 N Without (Roller specification) R5 5 RC 20 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 Controller Nil Without controller CH With controller C 5 H 7 T (Communication protocal Interface Communication plug connector I/O cable*2 /Input/Output) Symbol Type Applicable interface 5 Parallel inputNPN) Nil Without

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Ambient and fluid temperature (C) 10 or less Response time (ms) (1) 20 Max. operating frequency (Hz) Manual override Non-locking push type, Locking slotted type Push-turn locking slotted type Push-turn locking lever type {SY1 4, SY1 4A only} 1 2 1 2 Not required Lubrication Unrestricted Mounting position 150/30 Impact/Vibration resistance (m/s2) (2) Body ported Dustproof Enclosure Note 1)

Air Cylinder Series CS2 ø125, ø140, ø160

V No 200 V or less 2-wire 24 V PLC Terminal conduit 12 V Relay, PLC Yes 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Check Valve Series AK

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

Mechanically Jointed Rodless Cylinder Series MY1

300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Direct Operated Precision Regulator Modular Style Series ARP3000 1

) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

Clean Regulator

300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

Metering Valve with Silencer Series ASN2

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Please contact SMC in this case. 356 Series MGG Guide Cylinder Specifications JIS Symbol Standard Stroke Model (Bearing type) Long stroke (mm) Standard stroke (mm) Bore size (mm) 20 75, 100, 125, 150, 200 250, 300, 350, 400 25 350, 400, 450, 500 32 350, 400, 450, 500, 600 40 350, 400, 450, 500, 600, 700, 800 MGGM(Slide bearing) MGGL(Ball bushing bearing) 75, 100, 125, 150, 200, 250, 300 50

ZM

setting (ZSE1) 2 outputs, without analog output, 3 rotation setting (ZSE1) 2 outputs, without analog output, 200 setting (ZSE1) 1 output, analog output, 3 rotation setting (ZSE1) 1 output, analog output, 200 setting (ZSE1) 1 output, without analog output, 200 setting, PNP output (ZSE1) Note) When the product is used for the manifold, the exhaust air of the operating ejector may enter the

ZSE1/ISE1

NPN open collector 1 output w/analog output, 200 degrees adjustment 3 m 30 19 5 m 50 PNP open collector 1 output w/o analog output, 200 degrees adjustment 55 774

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

V 200 V or less 24 V or less IC circuit Grommet Relay, PLC 12 V Connector 2-wire 24 V IC circuit PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with