/

N.O. 2-port 7 MPa 59 14 19 63 19 61 3 MPa 7 MPa 3 MPa 7 MPa 52 59 52 59 71 56 59 56 59 71 79 55 17 14 17 14 7 7 14 7 14 7 9 9 22 19 22 19 12 12 19 12 19 12 15 15 56 63 56 63 75 60 63 60 63 75 83 59 22 19 22 19 12 12 19 12 19 12 15 15 54 61 54 61 73 58 61 58 61 73 81 57 SGH200 3-port 3-port dual pressure type N.C.

VDW

P Series 200 VCL VDW20 15A 1 VCS P Series 300 VCW VCW20 12 01A 257 Series VDW200/300 Dimensions VDW250-lF VDW350-lF 40 30 27 20 6.35 6.35 11.4 14 34 25 20 27 SMC 3 (N.O.) port M5, 1/8 (Bracket mounting hole) 2 x 3.5 3 (N.O.) port 1/8, 1/4 4 x 5 9 36.5 9 29.6 28 10.5 17.5 20.5 14.3 6.7 (for grounding) M3.5 (for grounding) M3.5 0.8 0.8 86 (82.5) 71 *-***-*-* VDW250-*F*-***-*-* VDW350-*F46.2

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Miniature Fittings M3, R(PT) 1/8, M5 Series M

Series KF Insert Fittings Union tee: KFT Applicable tube (mm) O.D. 4 I.D. 2.5 4 5 6 6.5 7.5 8 9 Effective orifice (mm 2) H1 (Hex.) Weight (g) H2 (Hex.)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

CV/MVGQ

D-G39/K39 D-G39C, D-K39C Data 9 9 10 10 11 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Water-cooledThermo-chiller

Note 9) Panel dimensions.These dimensions do not include possible protrusions such as a breaker handle.

KF

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

IZx-OMP0064

Power supply connector POWER Connector (e-con) IZS41, IZS42 7 8 12 13 9 1 2 3 4 5 10 11 14 6 Operation NO.

Multi-Axis Step Motor Controller

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 3 Shield Vcc B-4 GND A-4 A B-5 A A-5 B B-6 B A-6 Signal Connector B terminal no. Lock (+) B-1 Lock () A-1 Sensor (+) B-3 Sensor () A-3 Red 4 Black 5 Brown 1 Blue 2 17

S Couplers

/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 A (2) L3 H (1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS120-M5 M5 x 0.8 M5 x 0.8 8 10 28.3 10.3 9 9 25 22.2 25.5 AS120-U10/32 10-32UNF 10-32UNF AS220-01 30.5 13.2 14.3 14.6 32.4 27.4 12 (12.7) 35.5 18 1/8 1/8 AS220-02 35.3 17.5 18 19.5 34.8 29.8 17 (17.5) 27.2 40.3 1/4 1/4 AS320-03 40.8 19.7 22.5 24.3 40.6 35.6 19 30 45.8 3/8 3/8 AS420-04 42.4

Speed Controller with One-touch Fitting

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-03(S)A 5/32" 8.2 AS221F-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS221F-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS221F-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-

SMC Pneumatic Clean Series

27 H1 H FF 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 8 8 40 32 25 20 15 15 6 6 5 17 17 13 6 6 42.5 34.5 30 24 24 22 22 18 37.5 29 29 29 21 19.5 19.5 15.5 14 12 10 8 30.4 104 78 76 76 M6 x 1 depth 11 M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !3 i o MG CX y u Dy -X 20Data CY1F15 Detailed view of driving cylinder CY1F25 Detailed view of driving cylinder Section A-A' Note Component Parts Material Nickel plated Zinc chromated Description Body (rodless cylinder) Body End cover A End cover B Cylinder tube Description No. Note No.

Slit Valve

Description Part number Material Corresponding model XL XGT22-32XGT0101-2-1S Gate 1 A6063 XGT22-46236XGT0402-2-1S XLQ FKM XGT200-9-13S XGT22-32XM XY Kalrez 4079 XGT200-9-14S O-ring (Gate) 2 FKM XGT200-9-7S XGT22-46236Kalrez 4079 XGT200-9-9S DXGT22Wiper 3 XGT200-4-9S O-ring (Body opening side) 4 FKM XGT200-9-12S XSA XGT22O-ring (Bonnet assembly) 5 XGT200-9-11S XGT22Holding bolt 6 Stainless

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Fieldbus system EtherCAT compatible SI Unit

Val: -32767 to 32766 Val: 0 Enable Output will be user fault value. 1 Output setting for communication fault 2 Sets output when communication error is occurred. 9 Channel Disable Output will be held last state.

Digital Flow Switch (Integrated display type) ( compatible)

SMC do not guarantee the withstand pressure specified in ISO16030. 9: The Device ID varies depending on the product No.

XMD/XYD Series

1A S Valve seal Assy (4) Specific XLD40-2-9-1A ** XLD50-2-9-1A ** XLD63-2-9-1A ** XLD80-2-9-1A ** Standard AS568-009V AS568-016V AS568-016V Initial pumping valve seal (5).