Piping: 20 (Body Ported), Stations: 3 Stations

Set Flow: 20 (10~20l/min), Thread: Rc(PT), Port Size: 03 (3/8), Terminal Box: 2 [Terminal Box (Contact 2b), Neon Lamp: 0 (w/o Neon Lamp)

Set Flow: 10 (1~10l/min), Thread: Rc(PT), Port Size: 03 (3/8), Terminal Box: 2 [Terminal Box (Contact 2b), Neon Lamp: 0 (w/o Neon Lamp)

Piping: 20 (Body Ported), Stations: 3 Stations

Manifold Type: Body Ported, Valve Stations: 3 Stations, A, B Port: -, CE Marked: -

Stations: 3 Stations, Option: -

Stations: 10 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 4 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 4 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 4 Stations, Piping: U Side: Open; D Side: Closed, Thread Type: NPT, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 10 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 3 Stations, Piping: U Side: Open; D Side: Open, Thread Type: Rc, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 3 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Type: 20 (Common SUP/Common EXH), Stations: 03

,

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

VT325

DC: Can be attached to Grommet, Conduit, Conduit terminal. 220 VAC, 50/60 Hz VG 3 8 03 5 6 24 VDC S T Conduit terminal Without connection port (For manifold) 00 12 VDC TL Terminal with indicator light VP 9 7 240 VAC, 50/60 Hz Other DLDIN terminal with indicator light S070 Option For the coil rated voltage (option ), please contact SMC.

VP4

Conduit terminal DIN terminal VQ7 Conduit terminal with indicator light DL DIN terminal with indicator light Piping Option EVS 0 Bottom ported 1 Side ported Port size Rated voltage VFN 4 Without sub-plate Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03