Precautions 1

Stroke range Bore size (mm) 20 25 32 40 70.5 40 3.2 102 25 6.8 4 5 28 8 5 41 13 8 26 13 40 15.5 18 Up to 300 76.5 40 3.2 102 28 6.8 4 5.5 33.5 8 6 45 13 10 32 17 47 19.5 22 Up to 300 78.8 40 3.2 104 28 6.8 4 5.5 37.5 8 6 45 13 12 32 17 47 19.5 22 Up to 300 84.8 55 3.2 134 30 7 4 7 46.5 10 8 50 16 14 41 22 54 21 24 Up to 300 (mm) ZZ Z Y X S MM LZ NN NA N Bore size (mm) 20 25 32 40 131 21 8

CRB2/CRBU2/CRB1

depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 82 98 3 8 14 21 80 39 5 34 83 17 45 52 60 8 75 9 R30 CDRB1BW 63-E CDRB1BW 8030 32 M8 x 1.25 depth 12 17 0.006 0.017 30 0 0.052 1/4 R8 95 110 3 8 15 21 90 48 5 34 94 19 53.5 63 70 7.5 88 9 R30 CDRB1BW 80-E CDRB1BW 100M10 x 1.5 depth 13 25 0.007 0.020 45 0 0.062 1/4 R11 125 140 4 13 11.5 21 103 60 5 39 120 28 65 78 80 7.5 108 11 R30 CDRB1BW

C95

115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50

EXxx-OMN0037CN

0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21

Fieldbus system Analog unit

signal range (a to b) Voltage [V] Current [mA] Hexadecimal Decimal number number -10 to 10 V -5 to 5 V -20 to 20 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Vacuum Regulator

SET Straight R Elbow S Elbow T Elbow U 22 20 6 1/4" 8, 5/16" 10, 3/8" 10.5 10.5 10.5 11 21 21 21 21 27.5 27.5 28.5 30.5 21 21.5 24 27 26.6 40.5 65 One-touch fitting 6 Vacuum Regulator Series IRV10/20 Dimensions/IRV20A: Single Sided Connections IRV20A-lllG: With pressure gauge 53 60 52 2.3 2.3 VAC side U V 41 38 R VAC 43 50 46 SET 6 10.5 x 4.5 22 S T 10.5 R 50 Panel cut Panel plate thickness

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Z Applicable shaft type: J X = CRB2 Y = X = (mm) (mm) CRBU2 Y X Y X Size Size 4 to 19.5 4 to 19.5 4 to 19.5 4 to 39.5 50 50 CRB1 4 to 21 4 to 21 4 to 21 4 to 45 63 63 Y = 4 to 23.5 4 to 23.5 4 to 23.5 4 to 53.5 MSU 80 80 5 to 30 5 to 30 5 to 30 5 to 65 100 100 CRJ Symbol: A58 The rotation axis is reversed. The long shaft and short shaft are shortened.

Air Slide Table Series MXS

Shock absorber (Refer to page 71.) 9.5 10 5.5 10 21 K 5.5 NA x M5 x 0.8 thread depth 5.5 KA 21 Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 37.5 12 6 N x M5 x 0.8 thread depth 6 Note) (Helisert) 6 4 x M5 x 0.8 thread depth 7 1 18 (With stroke adjuster at extension end) 3.5 (With stroke adjuster at retraction end) 26 58 35 48 62

C95

17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

15 14.5 21.5 17.5 22.5 24.5 11.5 13.5 16.5 17 23.5 19.5 63 13.5 14.5 17.5 24 20 25 26 18.5 25 21 80 14 17 13.5 16.5 17.5 24 20 25 28 17 20 20.5 27 23 100 17.5 20.5 17 21 21 27.5 23.5 28.5 32.5 21.5 24.5 25 31.5 27.5 Auto switch mounting heights (mm) Auto switch type D-F5, D-J5 D-F5W, D-J59W D-F5BA, D-F5F D-F5NT D-A3 D-G39 D-K39 D-A5, D-A6 D-A59W D-B5 D-B6 D-A44 Bore size (mm) Hs Hs Ht Hs

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e CD J l B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 34.5 15 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 13 13 88 29 14 98 57 52 25 to 1400 40 23 15 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 52 25 to 1400 1/3.5 stroke 50 28 15 M10 x 1.25 76 145 52

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39

JXCx-OMT0005CN

No.JXC-OMT0005CN-A DeviceNet (DC24V) // JXCD1 1. . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8() . 11 9 . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 Node Address/Data Rate . 18 4.2 . 19 4.3 DeviceNet . 19 1Step Data Class 67h . 19 2IO Class 68h . 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR

Electric Slide Tables

L 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348 373 398 423 448 473 498 Trademark DeviceNet is a trademark of ODVA.

58

For auto switch mounting position and its mounting height, refer to page 21.

Profile Design ISO/VDMA Air Cylinder Series CP95

4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14

5 Port Solenoid Valve, Series VQC

Note) Drawing shows VQC1000 type. 21 Base-Mounted Type Manifold Exploded View Series VQC Manifold Assembly Part No.

One-touch Fittings

[mm] 1 D1 Weight I [g] Nylon Urethane X Round type 4 1/8 KQ2UD04-01GS 12 8.2 7.7 10.4 36.7 16.6 33.6 13.3 8.2 6.8 6 3.2 4.2 4.2 5.4 11.7 1/4 KQ2UD04-02GS 14 8.2 7.7 10.4 41.1 16.6 36.4 13.3 8.2 6.8 6 3.2 4.2 4.2 5.4 20.6 Q 4, 6 6 1/8 KQ2UD06-01GS 14 10.4 9.7 13.2 39.5 21 36.4 13.3 10.4 8.2 6 3.2 13.4 10.6 6 16.4 1/4 KQ2UD06-02GS 14 10.4 9.7 13.2 43.9 21 39.2 13.3 10.4 8.2 6 3.2 13.4 10.6