VEX-OMV0001 ) (11) (22) (12) (13) (14) (15) 10 VEX-OMV0001 P2 (22) (16) (12) (22) (17) () (18) (19) 3(R) (3) (6) (4) (20) 2(A) (22) (21) 11 VEX-OMV0001 No
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings
Bore sizes: 6, 10, 15, 20, 25, 32 mm; Non-rotating accuracy: ± 0.1°; 10- exhaust relief; 11- vacuum relief; 12- exhaust relief (available only in L, ball bushing bearing); 21- exhaust relief (available only in L, ball bushing bearing); 22- vacuum relief (available only in L, ball bushing bearing); PTFE grease used in Clean Room Series; Lithium grease used in Copper, Fluorine, Silicone-free
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Feedback circuit (VEA252 only) P/I/D adjustment NULL adjustment Warning Integrator cicuit Driving circuit Voltage comparing circuit Electro-pneumatic proportional valve GAIN adjustment 1.
Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 44
9 @0 21 @2 Cushion seal Urethane Rod seal NBR 21 is a non-replaceable part, so it is not included in the seal kit. Set of left nos. !8, !9, @0, @2. Piston seal NBR Cushion valve seal NBR MBK100-PS Cylinder tube gasket NBR Seal kit includes !8 to @0, @2. Order the seal kit, based on each bore size. Seal kit includes a grease pack (32 to 50 : 10 g, 63, 80 : 20 g, 100 : 30 g).
Seal kit includes a grease pack (32 to 50: 10 g, 63, 80: 20 g, 100, 125: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Model without air cushion is designed to include rubber bumpers. 29
9 @0 21 @2 @3 @4 @5 Cushion seal Special resin 2 Set of left nos. !8, !9, @0, @2, @3, @4, @5 Piston seal NBR 1 21 is a non-replaceable part, so it is not included in the seal kit. Wear ring Resin 1 Piston gasket NBR Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.
9 @0 21 @2 Cushion seal Urethane Set of left nos. !8, !9, @0, @2. Rod seal NBR 21 is a non-replaceable part, so it is not included in the seal kit. Piston seal NBR Seal kit includes !8, !9, @0 and @2. Order the seal kit based on each bore size. Do not disassemble the trunnion style. Seal kit includes a grease pack (40, 50: 10 g, over 63: 20 g).
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Piston Rod Assembly, GUIDED CYLINDER
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Piston Rod Assembly, GUIDED CYLINDER
, 180, 200, 250, 300 Variations CJ1 Basic style Standard variations Bore size (mm) Series Action Style Copper free Rod boot Page CJP CJ2 Standard Series CS1 125 140 160 180 200 250 300 Lube CM2 C85 Single rod Series CS1 Non-lube 1.10-2 CG1 (125 to 160 Only) 125 140 160 MB Air-hydro Series CS1 C95 Double acting CA1 125 140 160 180 200 250 300 Lube CS1 Double rod Series CS1W Non-lube 1.10-21
Normal mode 16 5.1 Summary of Normal mode 16 5.2 Menu 19 5.3 Window of Normal mode 21 5.3.1 Status window 21 5.3.2 Teaching window 23 5.3.3 Alarm window 24 5.3.4 Step data window 25 5.3.5. Parameter window 26 5.3.6 Drive test window 27 5.4 Teaching method 28 5.4.1 Preparation 28 5.4.2.
Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.
Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.
Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.
: (10-ARP) clean room compliant; (20-ARP) copper-free, fluorine-free; (21-ARP) clean room compliant, copper-free. fluorine-free, silicon-free
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Cylinder, Air, GUIDED CYLINDER
Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Cylinder, Air, GUIDED CYLINDER