5 Port Solenoid Valve

Warning Connection thread Proper tightening torque ( ( ( (N m) Rc1/8 3 to 5 Rc1/4 8 to12 Rc3/8 15 to 20 Rc1/2 20 to 25 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Rc1 1/2 48 to 50 Follow the procedure of the manufacturer when fittings other than SMC is used. 4. Piping Make P port piping so that supply air pressure does not become lower than operating pressure while operating.

Metal One-touch Fittings

Chamfer dimension D (Recommended value) (mm) M5 5.15.4 10-32UNF 5.05.3 Rc1/8 10.210.4 Rc1/4 13.613.8 Rc3/8 17.117.3 Rc1/2 21.421.6 NPTNPTF1/8 10.510.7 NPTNPTF1/4 14.114.3 NPTNPTF3/8 17.417.6 NPTNPTF1/2 21.721.9 Connection female thread size Connection thread size Proper tightening torque Nm G1/8 2.9 to 3.2 G1/4 5.7 to 6.3 G3/8 9.5 to 10.5 G1/2 14.3 to 15.8 8 - 2Specific Product Precautions6

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 Foot (L): CJ2WL, CJ2WL 10112122View E Mounting nut Relief port 2 x M5 x 0.8 GA GA NN GC F MM NN GC F Rod end nut Cover surface Piping port 2 x M5 x 0.8 MM D D LY LB LH LZ LX LT LT Y NA X S + Stroke H NA Y A X 4 x LC Mounting hole A H + Stroke Z + 2 x Stroke C B 0 0.3 B 0 0.3 Drawing of view E (mm) Bore size 16 10 15 15 B LT

CRJ

2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3652 & 4652 1.50 (38) 2.17 (55) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: 4T, 6T Connections: N, BRN Connections: 4, 6, BR 4 6 4 6 4 6 25.4 45 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70 (43.2) NPT 1/4

KC

after R thread installation. 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 6 6.8 6.8 19 Width across flats 8 14 K 21.5 13.1 8 16.2 M5 x 0.8 17 Applicable tubing M 24 20.4 10 25.6 17 19 22 H 25.5 30.4 12 35.4 D MS Connection thread (With sealant) Male Elbow: KCL T H (width across flats) Applicable A M Effective area (mm 2) Nylon Urethane 1.9 1.9 6 11 7 13 21 16 24 37 29 38 63 81 Connection

Parallel Type Air Gripper

Specifications 2. Operating method or operation 2-1. Design 2-2. Selection 2-3. Installation 2-4. Air supply 2-5. Piping 2-6. Operating environment 2-7. Lubrication 3. Maintenance 3-1. Precautions 3-2. Disassembly drawing 3-3. Finger assembly set replacement procedure 3-4. Seal replacement procedure 3-5.

c

Operating temperature (oC) 1 Fluoropolymer Tubing (PFA) Inch Size Series TILM RoHS Series Inch size Size Model Tubing size inch mm inch mm TILM01 1/8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Digital type Note 4) ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

However, it is constructed to be used for driving the product body, it may cause failure if it is used solely with a load applied. 2-4. Mounting and Installation 2-4-1. Mounting Surface It is recommended to mount the cylinder on a surface with a high flatness (e.g. a machined surface).

MU

wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic output (2-color indication) 5 V, 12 V

MU

wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic output (2-color indication) 5 V, 12 V

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

32 50 50 7 60 120 96 118 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 9 66 140 96 133 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 163 64 50.8 196 68 60.5 1 2, 3 4 4-16-7

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The display unit is conformed to CE mark.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Remove the lower bearing 11 from the body housing at this time. 4. Loosen the hexagon socket head cap screw with washers 12 to remove the cover 2 and 3 from the body. (Remove the cover from the right and left sides.) 5. Remove the piston 4 with the rack 6 from the body.

VNH

2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

Series SY100 3 Port Solenoid Valve Rubber Seal

Specifications Operating principle 1 2 3 4 1 2 3 4 SY1 T SY1 AT SY Series Power consumption at holding is decreased with the below indicated circuit, for energy savings.

Toggle Type Air Gripper

depth 14 Mounting thread 10 22 40 54 4 x M10 x 1.5 thread depth 12 Mounting thread (Both sides) 8 8 Open 23 Closed 2 50 0.2 124 110 64 30 7 50 0.2 36 2.5 10 16 60.5 (157) 52.5 35 66 Rc (G , NPT ) 1 4 1 4 1 4 2 x M10 x 1.5 thread depth 12 Mounting thread Finger closing port Rc (G , NPT ) 1 4 1 4 1 4 20 0.1 0 24 0.1 0 Finger opening port O 52 S 25 39.5 10.5 4 x M10 x 1.5 bottom hole dia.

For Water Digital Flow Switch Series PFW

Nil N Port size Size Applicable model Flow rate (l/min) Symbol Output specification 40 4 16 3/8 1/2 3/4 PFW704, PFW720 PFW720, PFW740 PFW740 03 04 06 NPN open collector 2 outputs PNP open collector 2 outputs 27 67 Specifications PFW720 PFW704 PFW740 Model Measured fluid Water Karman vortex Detection type 2 to16l/min 0.5 to 4 (setting is 0.6 to 4) l/min 5 to 40l/min Flow rate measurement

MU

, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Rear flange MUG25SMU25, #4 (#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63