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P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

AC Servo Motor Driver (Parameter Configuration using Setup software (MR Configurator2 TM ))

MR-J3-T if using the LECSC. MR-J3-B if using the LECSS. MR-J4-B or MR-J4-B(-RJ) if using the LECSS-T. Please select servo amplifier connection USB as the communication device. Click OK. Click OK. 7 - 1.2.4 Driver ON LINE Check Check that the driver is enabled (ONLINE). Check that the ONLINE/OFFLINE icon is displayed .

Antistatic Tubing TA  Series

T T Fixed end IDK 3. Because ester polyurethane is adopted, water cannot be used due to the occurrence of hydrolysis. 499 TA Series Antistatic Polyurethane Tubing: TAU Series Made to Order Coil Tubing Flat Tubing Please contact SMC for details.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Gun Type Ionizer

Press the knob to lock the setting. t Trigger Switch to turn on and off static neutralization y One-touch fitting Supply port of compressed air t i u Power supply connector Connector for power supply, F.G., and external switch inputs i Lighting LED Illuminate the object during static neutralization * Inside of the slide cover y u Description of LED Indicators LED Indicators w q e No.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

CJP Rear trunnion Integrated clevis Boss-cut basic Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73

MHF2

4 r t e !6 Parts list Parts list Note Material No. Description No.

IR10-OM00007

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. -2- . / 1 1.5 *3) *3) 1 1 () -3- IR1000 (1) 0.2% F.S.

VMx-OMP0001

B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Compact

W A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable bore size 12 16 20 25 D-M9m(V)/

TUH

T T IDK 473

F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

44

KFG2 KFG2 MS KKA KP LQ MQR T IDK 335

IDX-OM-O004C

IDX-OM-O004-B 2010 11 B2011 6 / Series IDF15E1-10 (-A,C,K,L,M,R,S,T) IDF15E1-20 (-A,C,K,L,M,R,T) URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ 2011 SMC CORPORATION All Rights Reserved.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, F/R COMBO MODULAR, AIRLINE EQUIPMENT, AC MASS PRO, HC, AC MASS PRO 1 MODULAR (NPT), 7.25075 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingBowl materialBowl

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, F/R COMBO MODULAR, AIRLINE EQUIPMENT, AC MASS PRO, HC, AC MASS PRO 1 MODULAR (NPT), 7.25075 lb, ModelComponentPort sizePressure gauge port size Note 1)FluidAmbient and fluid temperature Note 2)Proof pressureMaximum operating pressureSet pressure rangeRelief pressureNominal filtration ratingBowl materialBowl

GA342

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Pressure Relief 3 Port Valve with Locking Holes

F.R.L. combination VHS20 Y200-D Y200T-D AC20-D VHS30 Y300-D Y300T-D AC30-D VHS40 Y400-D Y400T-D AC40-D * New VHS series compatible with previous model spacer Y200(T)-A to Y400(T)-A. Spacer (Y-D) Spacer with bracket (YT-D) Pressure relief 3 port valve 8 - 5. Construction/ Parts list Standard specifications No.