CRBU

Single shaft T Double shaft Y J Y T S K A parallel key is used instead of single flat for size 40.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

Rotary Actuator/Vane Type

hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90

LVQ

T) V N 1 2 1 2 1 2 1 2 LVQ3 S, LVQ4 S LVQ5 S, LVQ6 S M V A B SMC U C A B Z D (Max. T) View Z LVQm0-S shown.

ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

2 Phase Stepper Motor/Without Motor Brake Series LXS

pitch 20 5 N C (5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Body mounting reference plane Work piece mounting reference plane T-slot A dimension T-slot B dimension 6.5 Refer to Cross section C-C. 27.5 T-slot B 4H9 Cross section C-C Model D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products [mm] Bore size [mm] Part no.

Made to Order

T 32 40 50 63 Q R S T Q R S T G1/8 7.5 Rc1/8 NPT1/8 156 140 74 7.5 176 160 84 Rc1/8 NPT1/8 G1/8 160.5 144 75 8 180.5 164 85 8 Rc1/4 NPT1/4 G1/4 202.5 179 91.5 12.5 266 242.5 121.5 14 Rc1/4 NPT1/4 G1/4 182 93 10.5 246 123 15 205 269 Note 1) The cylinder rod is retracted.

CJ2

and Z dimensions: With auto switch Single Acting, Spring Return: Double Clevis Style (D) CJ2D S Bore size Stroke Z + Stroke S + Stroke Rod end nut +0.030 0 CDH9 Piping port M5 x 0.8 Clevis pin (cdd9 ) 0.030 0.060 T-bracket For details, refer to page 6-3-11.

High Vacuum Angle Valve

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

Environment

Only Nil, S or T can be selected.

Rotary Actuator

Symbol -XA31 to -XA58 Shaft Pattern Sequencing II Applicable shaft type: S, J, K, T, Y Shaft type S J Standard K T Y Refer to page 4.

NCQ2/CQ2

Applicable Cylinder Series: (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/wT (Single acting), (N)CDQ2, (N)CDQ2W (Large bore size), (N)CDQ2K, (N)CDQ2KW, (Non-rotating rod), (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) Auto switch type s e r u t a e F l e d o M e z i s e r o b e l b a c i l p p A y r t n e l a c i r t c e l E D-A72 D-A73 Grommet (Perpendicular) D-A80 Without indicator light D-A79W

CJ2

6) B L F D Action S T Single acting/Spring return Single acting/Spring extend Standard CJ2 L S 16 45 R CDJ2 L S 16 45 C73 With auto switch R Number of switches With auto switch 2 1 n S n Built-in magnet Auto switch Port location on head cover Refer to the table below for selecting applicable auto switches.

Air Cylinder

S Single acting, Spring return T Single acting, Spring extend Nil Male rod end F Female rod end CM2 CM2 * Only for C, T, U, E, V, UZ mounting types. * Pivot bracket is shipped together with the product, but not assembled.

24

speed [mm/s] 494

PAB-OM-O003

Note 2) Operation is possible with a valve with small Cv value when the operation cycle is small. 12 How to Order P B 1 3 1 3 A S Female thread / Tube extension P B 1 3 1 3 A S With nut Port size Material of diaphragm Symbol Main fluid Pilot air Symbol Material of diaphragm connection size connection size Female thread 1 PTFE 01 Rc 1/8 N01 NPT 1/8 F01 G 1/8 Actuation Tube extension Symbol

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

Indicator: S, Control Method: S (Meter-in), Stud Position: A (Right Side), Tube Diameter: 03 (ø5/32"), Thread: N (NPT), Port Size: 01 (1/8), Seal Method: S (w/Sealant)