High performance type Step Motor Controller (Servo/24 VDC)

Power supply plug P.24for wiring.

5 Port Air Operated Valve SYA3000/5000/7000 Series

R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double 2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Male 4 P.19 Connector LQ2H 5 2 3 Female 4 P. 20 5 2 3 Male 4 P. 21 Elbow LQ2L 5 2 3 Female 4 P. 22 5 2 3 Male 4 P. 23 Run tee LQ2R 5 2 3 Female 4 P. 24 5 2 3 Male 4 P. 25 Branch tee LQ2B 5 2 3 Female 4 P. 26 5 2 3 Union elbow LQ2E 4 P. 27 5 2 3 Union tee LQ2T 4 P.

ASP

Metric size Inch size Pilot port Model Port size 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 M5 x 0.8 R 1/8 Rc 1/8 R 1/4 Rc 1/8 R 3/8 Rc 1/4 R 1/2 G 1/8 R 1/4 G 1/8 R 3/8 G 1/4 R 1/2 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/4 NPT 1/2 Note) Brass parts are all

Multistage Ejector Series ZL112.212

4 Exhaust port 76 P Standard ZL212 40 V ZA 54 125 Label ZX 188 61 ZR P Port exhaust ZL212P ZM V ZMA Exhaust port (EXH.)

Water-cooledThermo-chiller

50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.

MHL2

(mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-25D1 2 MHL2-20D1 2 MHL2-20D MHL2-25D 200 200 120 120 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 160 160 Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 100 100 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 0.5 MPa

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

High Power Cylinder Series RHC

Note 2) Contact P/A if a stroke greater than the maximum stroke is desired.

ASD

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

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r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR32l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR32l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 782 Regulator IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR12l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

90

r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole

reduces flow setting time

NPT thread r !

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

CJ5 L 16 S R 60 CDJ5 L 16 S R 60 H7BAL With auto switch With auto switch (Built-in magnet) Made to Order Refer to page 835 for details. Stainless steel cylinder Number of auto switches Seal material NBR seals (Nitrile rubber) FKM seals (Fluororubber) R V 2 pcs. 1 pc. n pcs.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Sine Cylinder Series REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

Sine Cylinder Series REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

Sine Cylinder Series REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.