Solid State Vacuum Regulator

Cable connector (4 wire) Right angle type Cable connector (4 wire) Straight type n50 4-7 Mounting hole 31 SMC PREGULATOR E SMC PREGULATOR E RESET 40 52 ITV2090 ITV2090 SET UNLOCK LOCK 84 100 12.5 M12 x 1 Cable connecting threads 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc 1/4 VAC port G OUT 2 ATM (Atmospheric pressure) OUT (Set pressure) VAC (vacuum pressure) 19 n36 Flat bracket P3020114

Pressure Gauge Guide

Symbol 46 42.5 Outside diameter Indicator light Max. display pressure Symbol 10 1.0 Unit: MPa Without indicator light Nil L2 Neon light (100 VAC/220 VAC) Attachment (Cover ring assembly) L5 LED/24 VDC Connection thread Without cover ring assembly Symbol Specifications Symbol Size Nil 01 R 1 8 Clear cover has no protrusion. (Clear cover is irremovable.)

IS1000

/DC or less 48 VAC/DC 100 VAC/DC Voltage 50 mA 40 mA 20 mA Max. operating current 30 G Impact resistance Operating Pressure Range Electrical Circuit ON pressure OFF pressure Up to 100 VAC/DC 0.5 Hysteresis Operating pressure (MPa) 0.4 Reed switch 0.3 0.2 0.1 0.1 0.2 0.3 0.4 0 Set pressure scale (MPa) How to Order IS1000 01 S Port size Seal Option 01 N01 X201 R 1/8 NPT 1/8 None With seal Lead

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

. (-1: Haploid 100 VAC, -2: Haploid 200 VAC) Note 6) means voltage indication symbol (IDU3D to 15C). (-1: Haploid 100 VAC, -2: Haploid 200 VAC) 14-14-4 3 Data: Calculation of Condensed Water Amount & Dew Point Conversion Chart Calculation of Condensed Water Amount Atmospheric pressure Relative humidity Water vapor (g/m3) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

LMU100/200 Series Mist Spray Unit

Contact capacity 50 VA AC, 50 W DC 1 2 5 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Pressure gauge for supply pressure Pressure gauge for tank pressure Pilot valve Recommended Equipment AIR BLOW Supply pressure AIR It is recommended to use each mist spray unit type with the mixing valves, magnet holders, branch pipes and nylon tubes listed in the table below.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

Pneumatic Purification

/DC SL-WVX1/2 As above, but with SMC 1/2 NPT VXD valve and no filterstop 110 VAC* SL-WVX3/4 As above, but with 3/4 NPT VXD valve and no filterstop 110 VAC* SL-WVX1 As above, but with 1 NPT VXD valve and no filterstop 110 VAC* FS Filterstop only MK111 Timer and Cord for SL MK12 Timer for filters 0-120 minutes, fixed discharge 2 seconds * other voltages available ISO 8573.1 Filtration Classes

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

, 50/60 Hz 00 01 Without sub-plate Rc 1/8 (6A) Accessory 2 200 VAC, 50/60 Hz Without sub-plate (For manifold) 4 Indicator light (DC is possible only for DL.)

3 Way,3 Port Solenoid Valve NVZ Series

22in-Hg 85PSl 1560ltr6kqfcmrl VAC -OPSI 0.034 1G32Nom. (l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

Digital Flow Switches Series PF2A

load current of 80 mA); 2 outputs Accumulated pulse output NPN or PNP open collector (same as switch output) Illuminates up when output is ON OUT1: Green; OUT2: Red 1 sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode Note 6): 3-digit fixed 12 to 24 VDC (ripple 10% or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no freezing and condensation) 1000 VAC

(50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800

(50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800

VS4120-021 (port size 1/4, 100 VAC, grommet type), VS4134-002 (no sub-plate, 200 VAC, grommet type)
*The grommet lead wire color is blue for the 100 VAC type and red for the 200 VAC type.

The VS4□20, VS4□30, and VS4□40 series have already been in production for more than 40 years.

Electronic Pressure Switch Series (Separate Type)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Set pressure range 0.1 to 0.4 MPa 0.1 to 0.7 MPa 0.02 to 0.3 MPa 0.05 to 0.7 MPa 0.1 to 1.0 MPa 7 to 100 kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) 24 to 125 VDC 100 to 250 VAC to 100 VDC to 100 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less

NVZseies

22in-Hg 85PSl 1560ltr6kqfcmrl VAC -OPSI 0.034 1G32Nom. (l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

25

to 240 VAC, 50/60 Hz 1 A 0 to 40C 35 to 65% RH (with no condensation) 220 g CE, UL, CSA Ambient temperature Ambient humidity Weight Standards/Directive 100 m/s2 ABS, Stainless steel 200 g (including cable weight) 10 to 50 mm (Recommended) 220 g (including cable weight) CE, UL, CSA Remote controller (Sold separately) IZS41-RC Model Type Infrared ray type 5 m Note 1) Transmission capacity

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(50/60 Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to

10%, 50/60 Hz10 A5.5 A (100 VAC) to 2.5 A (240 VAC)Refer to alarm function.RS-232CApprox. 28.7 lbs (13 kg)Power cable, Foot for fixing, Splashproof coverCE marking, UL (NRTL) standards, SEMI

10%, 50/60 Hz15 A10 A (100 VAC) to 4 A (240 VAC)Refer to alarm function.RS-485Approx. 60.6 lbs (27.5 kg) (including foot for fixing)Power cable, Foot for fixingCE marking, UL (NRTL) standards