,

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

3 Port Solenoid Valve

03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved 1st printing GT D-036 P-650(DN) * Printed in Japan.

VQ4000

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Nil X1 X502 Standard Body: Red Built-in silencer (EXH port) Pressure relief 3 port valve Optional specifications Symbol B R Z Description Knob color: Black Body size Flow direction: Right to left Symbol 20 30 40 50 Standard port size 1/8 3/8 1/2 3/4 PSI

Industrial Filter FGD Series

Industrial Filter FGD Series How to Order FGD C A 03 B N 002 Made to Order Symbol Element length Description None With differential pressure indicator Symbol Nil Element length L250 L500 (L250 x 2) A B X77 With differential pressure indication switch X78 Symbol Port size Port size Rc 3/8 1/2 3/4 Accessory 03 04 06 Accessory None Bracket Symbol Nil -B Symbol Element category Symbol Element

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

RoHS Membrane Air Dryer/Single Unit Type Series IDG03 30 IDG20 None (Standard) Nil P R 50 500 60

VEX1

Example: VEX1333-03 G36-4-01 843

VEX1

Power Valve: Regulator Valve Series VEX1 How to Order 03 D 3 1 0 B VEX 1 Regulator valve Option None Nil Bracket Foot (VEX110 only) Gauge B F G When specifying more than one option, combine symbols alphabeticaly.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Directional Control Driver for Electric Cylinder

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2005 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing JX 120DN Printed in Japan.

High Speed Pilot Operated

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Miniature Regulator

pressure Maximum operating pressure Regulating pressure range Rc 1/8, NPT 1/8 (Female thread) Air 1.2 MPa 0.8 MPa Standard: 0.2 to 0.7 MPa, Low pressure use (0.2 MPa setting): 0.05 to 0.2 MPa 5 to 60C (No freezing) Relieving type 0.065 Ambient and operating temperature range Construction Weight (kg) Model Port size IN Model OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03

ZSE5/ISE5

.; ~ '" '" DOWN button UP bulton ~ .{ LED (red) I SET button T2 NPTF'4 M5X O 8 deplh 5 I 12.3 20 4 .0' 2.7 17 depth 6.5 i 28 View A With bracket 50 (44) 4.%4S 40 30 39 II i ~g: D Sll:PR,~~RE~'mCil 0 0 M N '" 6 ;e;V 'P -$~ 11:rn I~ tP 00 lR ;l=i I I 12.3 I , 28 SMC CORPORATION ~. 1164,SH1MBASHI,MINATO-KU,TOKYO 10S,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P

•

17 I I 28 Fitting View A TSJ'/4 50 (44) (Tube Swaged Joinl) 4-%4.5 With bracket 39 , ~ oiL ' -"t~l=r 12.3 l 28 ,-16-4,SHIMBASHI,MINATO-KU,TOKYO 'OS,JAPAN Tel:03-3502-2740 Fax:03-5251-7240 SMC CORPORATION l si printing June 1995.0-036,P-56(M) Augus< 1996, 45(RP) Specllications are subJeclto change without poor notICe Printed in Singapore and any obhgatlOn on the pari of the manufacture.

Valve: None; Stop Valve: None, Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: U (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.