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Note 5) : For thread type: M5 and NPT only 508 Lubricator Series AL10 to AL60 Standard Specifications AL10 M5 x 0.8 AL20 1/8, 1/4 AL30 1/4, 3/8 AL40 1/4, 3/8, 1/2 AL40-06 3/4 AL50 3/4, 1 AL60 1 Model Port size Fluid Proof pressure Maximum operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 5 to 60C (with no freezing) AC-A AF-A 1/4: 30 3/8: 40 1/2: 50 50 Minimum dripping flow

1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

4 8 3 7 1 6 4 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 800 6 8 6 4 8 3 7 5 3 7 4 5 1 500 1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 20 Series CHN Technical Data 3-1 Cylinder Cushion Selection Procedure Caution Use a cylinder cushion within the maximum absorbed energy range.

Load Warning Allowable eccentric angle 1 < 5 1. Pressure Do not use it in the vacuum state, which is substantially different from the atmospheric pressure (above sea level) and in the atmosphere under being pressurized. 10-18-14 13 Shock Absorber: Short Type Series RBQ Precautions Be sure to read before handling.

Load Warning Allowable eccentric angle 1 < 5 1. Pressure Do not use it in the vacuum state, which is substantially different from the atmospheric pressure (above sea level) and in the atmosphere under being pressurized. 10-18-14 13 Shock Absorber: Short Type Series RBQ Precautions Be sure to read before handling.

Fig. 2 5 port switch valve 1. Loosen small screw (4) and remove piston cover (1) and end cover (2) from body (3). See Fig. 1. Leave piston cover gasket (5) and end cover gasket (6) attached to body (3). The installed position of the gasket at this time is shown in Fig. 2. 2.

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

5 . 1 Troubleshooting . 5 1 Chapter 6 References 6 . 1 Specification table . 6 1 6 . 2 Refrigerant with GWP reference . 6 1 6 . 3 Outer dimensions . 6 2 6 . 4 Electric wiring diagram . 6 2 6 . 5 Pneumatic and refrigerant circuits and their functions . 6 3 Chapter 7 Specification for Option A 7 . 1 Safety instructions . 7 1 7 . 2 Specifications . 7 1 7 . 3 Air piping . 7 1 Chapter 8 Specification

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram Power supply terminal block PCW-EC16Z00 PCW-EC16Z01 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS0) 0 1 2 3 4 5 6 7 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 9 8 7 6 5 4 3 2 1 0 F E D C B A 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2 1 CN9 4 3 2 1 CNA 4 3 2 1

5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B M12 x 1 M4 x 0.7 6, 10 17 6, 10 7 19.6 4 8.1 3.2 M14 x 1 M5 x 0.8 16 19 16 8 21.9 5 9.2 4 M20 x 1.5 M8 x 1.25 20 26 20 13 30 8 15 5 M26 x 1.5 M10 x 1.25 25 32 25 17 37 8 19.6 6 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

motors side ) motors side ) motors side) motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression filter 1 PB13 4500 4500 Notch shape selection 1 PB14 0 0 LEY63 LEY63D Lead A B C L A B C Series Equivalent Lead (Including pulley 5(2.86) 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Quantity Note NBR 5 m, Cylindrical type END100-005 1 FN11l1l 20 m, Cylindrical type END100-020 1 5 m, Step type END110-005 1 5 m, Cylindrical type END200-005 1 FN11l2l 20 m, Cylindrical type END200-020 1 5 m, Step type END210-005 1 7 Low Maintenance Filter Series FN1/FN4 Construction FN4102l-20-Sl r o t i q y OUT w u e IN DRAIN Component Parts Replacement Parts No.

0.25 0.3 0.35 0.4 0.45 60 50 40 60 50 40 Displacement (mm) 0.5 0.4 25,30 25,30 15,20 5,10 0.3 15,20 5,10 0.2 0.1 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Pitch moment Mp (Nm) Yaw moment My (Nm) Design Caution D1.

for piping IZN10E-11 With Stainless steel 316 One-touch fitting*2 + Anti-static tubing * Discharge time at a distance of 50 mm from the end of tube Tube I.D.: 5 mm Tube I.D.: 4 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 2 2 0.05 MPa 0.1 MPa 1 1 0.1 MPa 0.3 MPa 0 0 0 400 500 200 300 100 0 400 500 200 300 100 Maximum operating pressure is 0.1 MPa.1 Tube length [mm] Maximum