MK

1 !2 !3 No. !4 !5 !6 !7 !8 !

IDX-OM-W093

1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

IZx-OMV0005

Doc. no.IZ-OMV0005 PRODUCT NAME Ionizer Nozzle type MODEL / Series IZN10E Series 1 Doc. no.IZ-OMV0005 Contents Safety Instructions . 3 1. How to Order . 9 1-1.Ionizer body . 9 1-2.Accessories . 10 1-3.Repair parts . 11 1-4. Options . 12 2. Procedures to Operation . 12 3. Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2.

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric Nil B L None With bracket With bottom bracket Inch Note 1) Accessories are shipped together.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n: Number of auto switches) Different surfaces Same surface Different surfaces Same surface D-M9m D-M9mW D-M9mA D-A9m 10 15 Note 1) 45 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 45 + 15 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 10 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2

Low Profile Slide Table Series MXF

Body through-hole 1.

Digital Flow Switch (Integrated display type) ( compatible)

Maximum 6 106 Maximum Maximum -36No.PF-OMV0006-B [F 1] Setting of OUT1 The output mode of OUT1 can be selected.

CLK1

8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 102 + Stroke 55 6 Hole: 10H8 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion

High Power Cylinder Series RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Series MLGP

Operation Principle P6 6-1. Extension locking (type F) 6-2. Retraction locking (type B) 7. Installation P9 7-1. Air supply 7-2. Piping 7-3. Operating environment 7-4. Mounting 7-5. Preparation before operation 8. Pneumatic circuit P12 9. Manual unlocking P14 10. Maintenance P16 10-1. Disassembly/ Replacement 10-2. Maintenance 10-3. Construction 11. Auto switch P19 11-1.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

During cylinder operation, be careful not to get your hand or fingers caught between the plate and housing. 88 Dual rod cylinder/Compact type 6, 10 Series CXSJ 11-/1221-/22How to Order Clean series 11 12 Vacuum suction type Relief type(with specially treated sliding parts) CXS 6 50 J 11 L M9B S 21 6 50 M9B S CXS L J Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

6 !3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

6 !7 !8 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

Unit Manifold Valve

Solenoid valve No. 3 8 7 6 5 4 3 2 1 2 No. 8 No. 7 8 7 27 (For C2: 28) 9 No. 6 No. 5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting

LFE-OMZ0011

L/min 4 Yes gal/min Output Specifications 5 gal/min Symbol OUT1 OUT2 6 Yes Yes gal/min A NPN NPN 7 Yes gal/min B PNP PNP C NPN Analogue 1 to 5V D NPN Analogue 4 to 20mA Thread type Port size Symbol Content Rated flow range Symbol Port size Nil Rc 1 2 3 N NPT 3 3/8 Yes F G 4 1/2 Yes 6 3/4 Yes 8 1 Yes -11No.LFE*-OMZ0011 LFEZ (Isolated type) Options Rated flow range Symbol Lead wire and M12

Fluoropolymer Fittings Hyper Fittings LQ1 Series

No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 Class Class 1/8" 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Run tee male Run tee female Branch tee female 1/4" A A 1/4

3 Port Air Operated Valve Series SYJA300 1

Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.