2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(Except for when the version does not match or when in SIO mode) The display color can be set to red or green. 4 Flow Switch Flow Rate Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid

High-precision Digital Pressure Switch ( compatible)

value (main display). (1) Press and hold the SET button between 1 and 3 seconds in measurement mode.

SMC CORPORATION OF JAPAN

Keys, Menus, and LCD Displays .3-1 3.1 Key Functions . 3-1 3.2 Menu Options Instuctions . 3-1 3.3 The Stop Mode Top Menu . 3-2 3.3.1 The Others...

KP/KPQ/KPG

8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 3 4 4 5 6 7 10 11 12 13 21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 4 4 4 18 14 6 10 10 19.5 L A M H 17 8 18 26 21.5 Connection threads 19 10 29 41 24 22 12 46 58 25 Reference dimension for R threads after installation Male Elbow: KPL H (width across flats) Effective area mm2 Note 1) D1 Model L1 TPH TPS A Applicable

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

3100-5FZ Sta. 2) NVFR3200-5FZ NARBF3000-00-P-1 wFs3000-20A-1 r\)(T636-1A (P Sallery) Sta.3-4) NVFR3100-5Fz NW5FR3-01T-041-037 See Note 1) Mixed Contiguration Maniiold: 1 LINE ITEM '1 DESCRIPIION OTY Four Station Manifold Ass'y as lollows: Sta. 1-4) NVFF4100-3FZB NW5FR4-01T-041-M Mixr sta. 1-2) 3/8 side sta. 3-4) 1/2 side See Note 3) Note 1) Indicate gallery tor all blocking discs (P EA, or

I/O Configurator (NFC version)

Click Yes. (3) Click the "Save reg. info". button. (4) Confirm that Free is displayed for the Registration status of the Free slaves. (1) (2) (3) (4) -110No.EX-OMV0017 STEP 13 Check the wireless connection (1) Click the Normal mode button for Pairing:. (2) Click Yes to change to pairing mode. (3) Click the "Reset" button to release the pairing mode. (3) (2) (1) Slave unit registration window

SI Unit for Vacuum Manifold

Designation Content 1 RD+ Receive Data + 2 TD+ Transmit Data + 3 RDReceive Data 4 TDTransmit Data BUS IN/Port1: M12 4 pin socket D-coded (Port type: MDI) No. Designation Content 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data Fig. 2-1.

Smooth Cylinder

4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16 17 Smooth Cylinder Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

IDX-OM-U022

-4 i.2.6 . i-4 i.2.7 . i-4 i.2.8 . i-5 i.2.9 . i-6 i.3 . i-7 i.4 / . i-7 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 R . 1-2 1.2.5 V . 1-2 1.3 . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 2.3 . 2-8 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 1 3.5 . 3-2 3.6 . 3-2 3.7 . 3-3 3.8 . 3

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

CEx-OMI0064

No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. )0 ,+O H C 29 - # 0 0 P R [CR] No.

EXxx-OMS0026CN

byte3 815 SEN3(5) Byte4 AXA 0 Hi byte 1623 (0) Byte5 Lo byte 2431 Byte6 AXA 1 Hi byte (0) Byte7 Lo byte Byte8 DXB(3) 07 Byte9 07 DXD(4) Byte10 815 Byte11 Padding 12 byte 6 byte 1(42 ) -61No.EX-OMS0026CN SI ( ) 0 0 byte 1 + 4 byte -62No.EX-OMS0026CN byte Bit No. 0 1 2 3 0 4 ON/OFF 5 6 7 / 0 1 2 Reserved 3 () 1 4 () 5 Reserved 6 7 0 0 1 1 2 2 3 3 2 4 4 5 5 6 6 7 7 0

Stroke Reading Cylinder and Counter

0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

graph MY1MW: M3 where 1.4a = 280 mm/s) = 5.7 (Nm) FE -X M3E 1 3 1 3 M3E = x FE x Y = x 179.1 x 29.6 x 10 3 = 1.77 (Nm) 20Load factor 5 = M3E/M3Emax = 1.77/5.7 = 0.31 Data 6.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

3 1 3 M1E = x FE x Z = x 179.1 x 37.4 x 10 3 = 2.23 (Nm) Load factor 4 = M1E/M1Emax = 2.23/42.1 = 0.05 CX M3 M3E: Moment Y DM3Emax (from 5 of graph MY1MW: M3 where 1.4a = 280 mm/s) = 5.7 (Nm) FE -X M3E 1 3 1 3 M3E = x FE x Y = x 179.1 x 29.6 x 10 3 = 1.77 (Nm) 20Load factor 5 = M3E/M3Emax = 1.77/5.7 = 0.31 Data 6.

Slider Type/Ball Bushing Bearing

3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

RHC

3,000 6 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 6 1/4, 3/8 8 1/4, 3/8 10 1/4, 3/8 10 1/4 Maximum speed Vmax (mm/s) 1000 3 25 20 1500 4.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 20 2000 6 2500 7.5 = 0.7 0.5 3000 9 10 0.1 0.3 500 2.5 1000 5 0 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax (mm/s) 2000 10 32 1/4 1

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-J solenoid. -11) Type of actuation 1 | 2 position, smgle solenod 2 I 2 posfton doube solenod 3 | 3 posibon closed cenbr 4 | 3 positon ex haLrst cenler 5 | 3 positon pressure ceiter ' Bectified. 24VAC available t e dolble $lsoid !

High-precision Digital Pressure Switch ( compatible)

value (main display). (1) Press and hold the SET button between 1 and 3 seconds in measurement mode.

CEx-OMB0060

Response Status Check sum code Response data details + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C Preset value Allowance upper limit Allowance lower limit Output form (O/H/C) Writing preset data Command Block # 0 0 D W [CR] Unit No. Command Preset No.