Add/dEC OUT1 (29 ) OUT1 OUT1 ( [n2dH]) ( [n2AH]) 3 1 3 6 6 1 6 3 1 1 4. [F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.
Model VHS4510 VHS4510-06 VHS5510 1 (P) 2 (A) 3/4 1 1/4 3/8 1/2 3/4 Port size 1/2 1/2 3/8 3 (R) 77 1 (P) 2 (A) 27 82 125 38 55 Effective area (mm2) Push the handle and then turn. Double action construction prevents erroneous operation. 49 2 (A) 3 (R) 36 42 40 50 53 0.77 0.42 Mass (kg) 0.36 Combination with modular type FRL is possible.
1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 230 + 2 (strokes) 200 2-Rc 1 2 (port size) 30 30 2 x 4-31.5 depth of counter bore 26 Width across flats 36 40 40 62 62 4-19 through 182 226 3 5.5 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 109 + Stroke 17 + Stroke 17 182 226 2-M24 x 3 effective thread depth
234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299
ITVX G thread With flat bracket G1/4 G3/8 PVQ G1/4 20 depth, depth of counterbore 1.5 Port 1 (Supply port), Port 2 (Output port) 23 depth, depth of counterbore 2 Port 1 (Supply port), Port 2 (Output port) 20 depth, depth of counterbore 1.5 Port 3 (Exhaust port) 100 84 4 x 7 VY1 VBA VBAT 39 AP100 52 40 24 24 Flat bracket With L-bracket 1/4 (Rc, NPT) Port 3 (Exhaust port) 1/4, 3/8 (Rc, NPT)
MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT
MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT
Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VER 3 L L 2 2 VEA 10 AFM AF ARP20K/30K/40K VHS VY1 1 1 12 2 4 14 Solenoid valve: Non-lube type VBA VBAT 5 1 3 AP100 2 1 2 1 2 1 L L AFM AF ARP 701 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Symbol Regulator with backflow function Regulator
Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VY1 3 L L VBA VBAT 2 2 10 AFM AF ARP20K/30K/40K VHS AP100 1 1 12 2 4 14 Solenoid valve: Non-lube type 5 1 3 2 1 2 1 2 1 L L AFM AF ARP 759 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Symbol Regulator with backflow function
Doc. no.XL-OMS0001-B PRODUCT NAME High Vacuum L Type Valve MODEL / Series / Product Number XLA Series Contents Safety Instructions 2 1. Product Specific Precautions 1 4 (Piping, Air Supply) 2. Product Specific Precautions 2 5 (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 3. Product Specific Precautions 3 7 (Maintenance parts) 4. Specifications 9 5.
gauge AF-A Note 2) Round type (with color zone) Standard G36-10-l01-L G46-10-l01-L 0.02 to 0.2 MPa setting G36-4-l01-L G46-4-l01-L AR -A -B Note 1) Assembly of a bracket and set nuts Note 2) l in round pressure gauge part numbers indicates a pipe thread type.
light/surge voltage suppressor VQ DIN terminal (D) VKF VQZ VZ VS VFN Max. 10 (Surge voltage suppressor) Manual override (Non-locking) Applicable cable O.D. 6 to 8 Rc 1/8 (External pilot port) Rc 1/8 (Pilot exhaust) Switching plate (Light) (Mounting hole) Rc 1/2, 3/4, 1 (P port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 (R port) 4-9-5
LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.
MHL2-16D MHL2-16D1 MHL2-16D2 SMHL, #2 SMHL2A, #3 SMHL2A, #4 (#4+#5) 2.2-8 Series MHL2 Dimensions MHL2-20Dl 10 10 11 2-M6 X 1 Thread depth 7 (Mounting thread) D Closed J A cross view (Fingers closed) C B A 4H9 +0 030 0 Depth 4 2-6.6 (Body mounting hole) 52 6.45 5 5 4-M6 X 1 Thread depth 12 (Mounting thread) 5 4H9 +0 030 0 Depth 4 Dimensions of auto switch mounting groove (Enlarged view) 27H9
5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2) 1Nm = 0.7375 ftlb 1Nm = 0.7375 ftlb Static moment Moment due to work load when cylinder is at rest.
JIS Symbol 15-9-43 2 Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.
screw 2 1 3 (2b) How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6.
VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V DIN terminal type VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram
4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.
Fittings & Tubing Air Cylinders Rotary Actuators Note 2) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 25 6 Rod end nut 9 Flat washer 5 9.2 10.5 4 4 10 15.5 27 + Stroke 14 25 8 4 41 + Stroke 16 17.5 5 Note 2) 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4