INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

(Default settings) Solenoid Specifications Electrical entry DIN terminal (D) DIN terminal (Y) D, Y Coil rated voltage [V] DC 24, 12 AC (50/60 Hz) 100, 110, 200, 220 Allowable voltage fluctuation 10% of rated voltage*2 Power consumption [W] DC Standard 0.35 (With light: 0.45) 100 V 0.78 (With light: 0.87) 110 V [115 V] 0.86 (With light: 0.97) [0.94 (With light: 1.07)] Apparent

Centering Unit

[10] Be sure to read this before handling the products.

8

In the case of Fig. (3), ripple 10% means V' V" V'/V x 100 = 10% When no pulsation has occurred, ripple is 0%. V ZSE ISE Vacuum breaking pressure Positive pressure added for releasing the work or quickly returning to atmospheric pressure after breaking the vacuum condition. V' V" PSE V Vibration resistance The amount of vibration a device can withstand without damage.

CV/MVGQ

Valve Mounted Cylinder Series CV/MVGQ 10, 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Variations CL Standard variations Bore size (mm) Series Action Page Buit-in magnet With air cushion With One-touch fittings With auto switch With strong scraper MLGC CNA Series CVJ5 10 CB Double acting 16 3.5-6 CV/MVG CXW Series CVJ3 CXS Single acting (Spring return) (Spring extend) 10 3.5-12 16 CXT MX Series

Air Cooled Aftercooler Series HAA 1

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).

PSxx-OMG0005CN

(12 V ) LINELINE(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S.

SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

Exhaust Cleaner for Clean Rooms AMP Series

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Precision Clean Regulator Series SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

Precision Clean Regulator

70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative

VEA

mA Weight 0.12 kg VEA 2 5 0 With Feedback Circuit: VEA252 (Same main features as VEA250/251) Sensor feedback voltage Power amplifier: Printed circuit board terminal block type Recommended range 0 to 5 V (S.GAIN x 0.1 to x 10) Function Input impedance 100 k or more With feedback circuit Malfunction defection circuit Basic Symbol Pre-amplifier-gain x 100 (Fixed) Integral action time (DELAY

NAME

Super Mist-Separator NAME Series Filtered air exceeds clean room class 100 specifications Remores virtually all Oil mist abwe 0.01pm particle size. Activated carbon element provides superior fiIbation and longer element life. (10 times NAMD Micro-mist separator) Special color changing element allows visual monitoring of element life.

Special Specifications:

Specifications Specifications AFF2B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on pages 14-20-10, 16, 23, 31, 37 and 43. Refer to How to Order for standard specifications on pages 14-20-3, 10 and 16.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

AMR3000 to 6000

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

ZSE1/ISE1

Variable hysteresis 1 to 10% of set pressure (Variable) Easy and simple wiring 16-6-1 2 Series ZSE1/ISE1 How to Order Operating pressure range/ Setting pressure range Piping specifications R 1/8 NPTF 1/8 01 T1 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) threaded.

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

EX600-SEN_eng

Input data only (Default setting) Pin number OFF OFF OFF ON ON ON 2 : : 3 1 4 2 Content Content 100 Mbps, half duplex 100 Mbps, full duplex 10 Mbps, half duplex 10 Mbps, full duplex OFF OFF OFF ON ON ON 3 : : Automatic Signal name Setting2 1 2 3 4 5 6 7 8 ON OFF OFF OFF ON ON ON RX+ RXSettings2 TX+ TX: : OFF OFF OFF ON ON ON : : (2) (3) Content OFF OFF OFF ON ON ON SI unit output data size

IBV-OMY0015

Designated nozzle: IBG1-12-10: Nozzle length (50, 100, 150, 300) Silencing nozzle: IBG1-12S Set including the designated nozzle and silencing nozzle: IBG1-12-10-S : Nozzle length (50, 100, 150, 300) 4. Impact resistance of the product is 150[m/s2]. Vibration resistance is 30[m/s2]. Avoid applying vibration exceeding the allowable value to the product. Mounting Warning 1.