AS-FPQ/AS-FPG

5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 32 40 32 40 Rod end threads Female threads Male threads Air 1.5MPa 1.0MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without

LJ1H

P N S Ground ball screw Rolled ball screw Slide screw 1 2 Series LJ1H10 Standard Motor Motor Output Ground Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 PB 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc1/8 E M5: M5 x 0.8 (female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Optional When optional parts only are

Precision Clean Regulator

SRP1-M5 SRP1-01 Pressure gauge part no.

Title not found

P-80 (JT)

ZSE3/ISE3

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

Compact Cylinder with Solenoid Valve/

C Example) Bolt M5 x 45L: 4 pcs.

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

100

0, P cannot be selected. !

Digital Flow Switch Series PFA For Air Series PFW For Water

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

ASD

(Refer to p. 2.4-2 and 2.4-3 in the catalog "Best Pneumatics 4 ".)

Compressed Air Preparation Filter

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

ZQ-OM01401

) (ZQ1-LW6-N-A) *FUNC *ZQ-ZSV 5.2 1 2ON 3, 4 51015 10 1% 6 7LCD 8FG 19 - No.ZQ-OM01401-B 6. 6.1 ON () () 6.2 1 2(0.4N m ) 315 30 (0.06~0.10 Nm) 20 - No.ZQ-OM01401-B 7 , 7.1 () 1 PBT 2 ,Assy POM, 3 PBT 4 PBT 5 6 (PET) P.25 3 7 HNBR P.25 6 8 SUS 9 10 PC P.25 4 11 SUS 12 PVA P.25 5 13 P.2223 1 14 PBT 15 P.2425 2 16 (V) P.25 7 17 Ass'y P.25 9 O HNBR,NBR

HRX-OM-Y098

(Refer to About TEMP READY function (P.527) for TEMP READY function.) Display [ ] if the circulating fluid discharge pressure has reached the pressure limit value. (Refer to About control function of circulating fluid discharge pressure (P.5-32) for details of PRESS LIMIT.) Ready / P.

HRX-OM-X037

P.5-12 (16) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (17) Operation mode P.5-12 Common or serial communication ( mode). (18) Operating condition display It indicates the run and stop status of the product. P.5-12 (19) Run/Stop To run/stop the product.