Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: 1(180°), Thread: R, Port Size: M5 x 0.8, Applicable Tubing O.D.: ø1/4, Seal: -

Multistage Ejector Series ZL112.212

5 4.5 (40) Section A/ With Digital Pressure Switch for Vacuum ZL212-D 30 (5.8) 4 x M5 x 0.8 Thread depth 6 (Mounting hole) 73 87 1077 Series ZL Made to Order Specifications Please contact SMC for detailed specifications, dimensions and delivery.

High Pressure Coolant Valve

(-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 36 44.4 57.7 66.4 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 TQ 70 92 109 631 A VNH Series Specific Product Precautions Be sure

HRX-OM-W002

(High pump head Rated current of leak voltage x size [Optional]) current (A) [mA] HRR012-A/W-101-phase AC100V (50/60Hz) 15 30 1-phase HRR018-A/W-10AC115V (60Hz) HRR012-A/W-2010 30 HRR018-A/W-203 cores x 14AWG HRR024-A/W-20(3 cores x HRR030-A/W-20HRR012-A/W-20-T 2.0mm2) 1-phase HRR018-A/W-20-T HRR024-A/W-20-T HRR030-A/W-20-T (including 200-230V AC ground) (50/60Hz) 15 30 HRR012-A/W-20-T1 HRR018

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Stroke (mm) Pulling force Bore size (mm) 40, 50, 63 80, 100 Thread size 3 10N M3 x 0.5 x 30l or more 3 24.5N M5 x 0.8 x 40lor more Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Rubber cap wManual release lock type Push the M/O knob and turn it 90 counterclockwise.

Guide Table Series MGF

Brown [Red] Load Load Switch 1 Blue [Black] Switch 1 Blue [Black] Brown [Red] Brown [Red] Switch 2 Switch 2 Blue [Black] Blue [Black] Power supply voltage Internal voltage drop Load impedance Load voltage at OFF = x 2 pcs. x Leakage current Load voltage at ON = x 2 pcs. = 1mA x 2 pcs. x 3k = 6V Example: Load impedance is 3k.

HRX-OM-X071

Sensitivity (High pump head Rated current voltage x size of leak current [Optional]) (A) [mA] 3 cores x12AWG 1-phase (3 cores x HRR050-A/W-2020 200-230V AC 3.5mm2) (50/60Hz) (including ground) 30 4 cores 3-phase x14AWG 380-415V AC(50/60Hz) (4 cores x HRR050-A/W-4010 2.0mm2) 460-480V AC(60Hz) (including ground) Installation/operation in accordance with the UL standard For operate the product

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to CCT63

2/3 Port Valve for Various

Manifold base Individual port Rc Applicable valve Base weight (g) VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Construction/ Principal Parts Material 1/8 1/4 1/8 1/4 VXA31 5-00 n x 100 + 50 VXA32 5-00 n x 160 + 70 Model/Valve Specifications Av x 10 -6 (m 2) Cv converted C [dm 3/(sbar)] b Cv Oil Air Flow characteristics Max. operating pressure differential (MPa) Orifice

Magnetically Coupled

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) Horizontal F2 = (W + WB) x (COS + SIN) Inclined (Refer to page 3 for vertical operation.)

Speed Controller with

n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 Note 1) Refer to page 3 for L8.

Slit Valve

width (mm) 32 x 222 46 x 236 50 x 336 Applicable wafer size Symbol 32 Note) Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 10 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to

Digital Flow Switch (Integrated display type) ( compatible)

Option Part number Remarks ZS-40-K Taptite screw for PF3W704/720 (3 x 8), 4 pcs. Bracket ZS-40-L Taptite screw for PF3W740 (3 x 8), 4 pcs. ZS-40-M Taptite screw for PF3W711 (4 x 10), 4 pcs.

Digital Flow Switch (Integrated display type) ( compatible)

Option Part number Remarks ZS-40-K Taptite screw for PF3W704/720 (3 x 8), 4 pcs. Bracket ZS-40-L Taptite screw for PF3W740 (3 x 8), 4 pcs. ZS-40-M Taptite screw for PF3W711 (4 x 10), 4 pcs.

HRX-OM-S004

to 230VAC HRS150-W-20R8-5 40 (4 cores x 8mm2) (60Hz) *including ground HRS100-A-40HRS100-W-403phase 380 to 415VAC 30 M5 HRS150-A-40(50/60Hz) HRS150-W-404 cores x AWG10 3phase HRS100-A-4620 R5.5-5 (4 cores x 5.5mm2) HRS100-W-46380 to 415VAC *including ground (50/60Hz) 3phase HRS150-A-46460 to 480VAC HRS150-W-46(60Hz) *1: A specified earth leakage breaker is installed for option B [Earth leakage

HRX-OM-X084

Rated Sensitivity Rated current voltage x size voltage of leak (A) [V] current [mA] 1-phase 100, HRR010-A/W-10100V AC(50/60Hz) 115 15 115V AC(60Hz) 3 cores x 14AWG (3 cores x 30 2.0mm2) (including 1-phase ground) 200, HRR010-A/W-20230 10 200-230V AC (50/60Hz) Installation/operation in accordance with the UL standard For the product operation in the UL compliant conditions, the conditions

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet VACUUM PAD, ZP, ZP2, ZP3. OVAL CUP WITH BUFFER. 28.34000 lb. M30.