Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model SY3000-37-81A-3-N Single : For 1 to 4 stations SY3000-37-81A-3-6 Double/3 position: For 1 to 4 stations SS5Y3-20SA SY3000-37-81A-2-N Single : For 5 to 8 stations SY3000-37-81A-2-4 Double/3 position: For 5 to 8 stations SY3000-37-81A-3-N Single : For 1 to 8 stations SS5Y5-20SA SY3000-37-81A-3-6 Double/3 position: For 1 to 8 stations SY3000-37-81A-3-N Single : For 1 to 4 stations SY3000

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Table of Contents

6 6 6 6 6 CE1 D-F7/J7/F79F 3 3.5 3 3 3 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

A

3 5/8 6 6 1 3/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 1/8 1 5/8 1 1/8 5/16-24 3 1 3/8 6 11/16 250 (2.5) 3.1 1.5 0 1.3 1.06 2.13 2.48 1 3 1/8 3 3/4 3/8 1 6 1/8 6 1/8 2 1/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 5/8 115/16 1 1/2 1 1/4 3/8-24 3 3/4 1 5/8 7 7/8 325 (3.25) 3.9 2 0 1.57 1.18 2.59 2.72 1 3/8 3 13/16 4 1/4 1/2 1 1/4 7 3/8 7 3/8 2 3/4 5/8 11/64 1-14 3/4 5/8 1/2 1 3/8 1 5/8 2 1/4 1 1/2 1 1/

Table of Contents

3.3 8.8 3 5 5.7 2.7 5 3 12 5.8 12 6 16 MHSH3-63DA MHSH3-80DA 4 4 3 3 7.2 8.2 10.2 11.2 6 6 18 21 Note) For dimensions, refer to the MHSH3-32 to 80D dimensions on page 12-7-39.

Table of Contents

3 !6 !7 !

Table of Contents

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

ZP

6 1.48 to 1.84 (2.0 to 2.5) 0.045 (0.2) 0.11 (0.5) 3, 6, 10 15, 20 3, 6, 10, 15, 20 M8 x 0.75 4 to 16 Replacement Part No.

V100

S070 VQ Flow Specifications/Response Time VKF Flow characteristics Response time ms Note 2) Maximum operating pressure Power consumption b 0.27 0.28 0.27 0.28 0.27 0.28 ON 3 or less 5 or less 3 or less 5 or less 3 or less 5 or less Cv 0.011 0.021 0.011 0.021 0.006 0.011 OFF 3 or less 3 or less 3 or less 3 or less 6 or less 6 or less C[dm3/(sbar)] 0.042 0.083 0.042 0.083 0.021 0.042 VQZ 0.5

Electric Actuators

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

ZP

6 1.48 to 1.84 (2.0 to 2.5) 0.045 (0.2) 0.11 (0.5) 3, 6, 10 15, 20 3, 6, 10, 15, 20 M8 x 0.75 4 to 16 Replacement Part No.

AC Servo Motor Driver (CC-Link Type ）

LG NC 1 2 3 4 5 6 LG P5D RDP SDN SDP RDN LG NC 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Table of Contents

(Refer to pages 15-6-3 to 15-6-5 for details.)

AC Servo Motor Driver (CC-Link Type ）

LG NC 1 2 3 4 5 6 LG P5D RDP SDN SDP RDN LG NC 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

SY

solenoid 3 position 5 SY 3 2 4 A/B port size Series SY3000 SY5000 3 SY3000 5 SY5000 Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 Type of actuation 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 8 One-touch fitting C8 Mixed M 2 2 position double 3 3 position closed center 4 3 position exhaust center For mixed specifications, order separately on a

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM