VQ5000

Mounting screw (M4) Terminal block cover M3 Screw Gasket 6mm Electrical entry 2-G3/4 Step 3. How to attach the terminal block cover Securely tighten the screws with the torque shown in the table below, after confirming that the gasket is installed correctly.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

XL

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

Ejector Valve Unit Series ZYY/ZYX 1

(M3: Port PE) Pilot valve exhaust port Hysteresis setting trimmer (AN203-KM8) Silencer 62.1 57.1 49.4 41.6 33.6 29.5 23.5 21 10 Vacuum port (8.25) 3.75 6 One-touch fitting Port V (5.25) (13.5) 19 88 18.75 16.75 Supply port Button for block separation 6 One-touch fitting Port P1 27 ZYX35LOZ-10S1 (Specifications without vacuum switch) End plate (P44027A) 31 20 EXH.

CDQ2BP series

35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

NCRBIBwserbs

(Not a\ailabl on NCRBI BWl0) x ( ) : When porl A is pressunzed. x x Optional M3 fiiing available S ho/r lo ofder page NCDRBIOWIQoI$ol[r$Q Rotation Time Setting Bodg To k Used As A Flange ltcRElB\ltfto Actual Torque Even a small torque generated by the rotary actuator, due to inertia, can cause damage. Therefore.

Process Pump

= (10-3 m2/s) = (mPas)/(kg/m3) 603 PAF Series Performance Curve: Air Operated Type PAF3413 Flow Rate Characteristics PAF5413 Flow Rate Characteristics 0.5 0.5 Cycle 4 Hz Cycle 3 Hz Cycle 2 Hz Cycle 3 Hz Cycle 2 Hz Cycle 1 Hz SUP = 0.5 MPa SUP = 0.4 MPa SUP = 0.5 MPa 0.4 0.4 SUP = 0.4 MPa Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.3 MPa 0.3 0.3 SUP = 0.3 MPa SUP = 0.2 MPa

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?