101 kPa10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessEnclosureOperating temperature rangeOperating humidity rangeVibration resistanceImpact resistance?3% F.S. or less1000 VAC for 1 min.
101 kPa10 to 0 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P)10% or less (With power supply polarity protection)1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC5 ms or less?1% F.S. or lessEnclosureOperating temperature rangeOperating humidity rangeVibration resistanceImpact resistance?3% F.S. or less1000 VAC for 1 min.
0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%
0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%78Horizontal 487Non-magnetizing lock42.924 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%
)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%