AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

Power Valve: Economy Valve Series VEX5

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX592444 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None B Nil Bracket G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Soft Start-up Valve AV2000/3000/4000/5000

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

5 Port Solenoid Valve SY Series

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

MXS

62 48 26 6 1 N-M5 X 0.8 thread 6 deep (Helisert) 6 12 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 X 0.8 thread 5.5 deep 10 21 5.5 K 10 5.5 9.5 12 6 12 5.5 J 10 Max. 13.5 (With stroke adjuster at retraction end) I Operating port 2-M5 X 0.8 11 3 2-M5 X 0.8 thread 5.5 deep 5H9 4 deep +0.030 0 HA GA 5H9 4 deep +0.030

Precautions 1

Stroke range Bore size (mm) 20 25 32 40 70.5 40 3.2 102 25 6.8 4 5 28 8 5 41 13 8 26 13 40 15.5 18 Up to 300 76.5 40 3.2 102 28 6.8 4 5.5 33.5 8 6 45 13 10 32 17 47 19.5 22 Up to 300 78.8 40 3.2 104 28 6.8 4 5.5 37.5 8 6 45 13 12 32 17 47 19.5 22 Up to 300 84.8 55 3.2 134 30 7 4 7 46.5 10 8 50 16 14 41 22 54 21 24 Up to 300 (mm) ZZ Z Y X S MM LZ NN NA N Bore size (mm) 20 25 32 40 131 21 8

CRB2/CRBU2/CRB1

depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 82 98 3 8 14 21 80 39 5 34 83 17 45 52 60 8 75 9 R30 CDRB1BW 63-E CDRB1BW 8030 32 M8 x 1.25 depth 12 17 0.006 0.017 30 0 0.052 1/4 R8 95 110 3 8 15 21 90 48 5 34 94 19 53.5 63 70 7.5 88 9 R30 CDRB1BW 80-E CDRB1BW 100M10 x 1.5 depth 13 25 0.007 0.020 45 0 0.062 1/4 R11 125 140 4 13 11.5 21 103 60 5 39 120 28 65 78 80 7.5 108 11 R30 CDRB1BW

EXxx-OMN0037CN

0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21

Fieldbus system Analog unit

signal range (a to b) Voltage [V] Current [mA] Hexadecimal Decimal number number -10 to 10 V -5 to 5 V -20 to 20 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX 2 3 21 1 1 G Normally Closed (N.C.)

Vacuum Regulator

SET Straight R Elbow S Elbow T Elbow U 22 20 6 1/4" 8, 5/16" 10, 3/8" 10.5 10.5 10.5 11 21 21 21 21 27.5 27.5 28.5 30.5 21 21.5 24 27 26.6 40.5 65 One-touch fitting 6 Vacuum Regulator Series IRV10/20 Dimensions/IRV20A: Single Sided Connections IRV20A-lllG: With pressure gauge 53 60 52 2.3 2.3 VAC side U V 41 38 R VAC 43 50 46 SET 6 10.5 x 4.5 22 S T 10.5 R 50 Panel cut Panel plate thickness

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Z Applicable shaft type: J X = CRB2 Y = X = (mm) (mm) CRBU2 Y X Y X Size Size 4 to 19.5 4 to 19.5 4 to 19.5 4 to 39.5 50 50 CRB1 4 to 21 4 to 21 4 to 21 4 to 45 63 63 Y = 4 to 23.5 4 to 23.5 4 to 23.5 4 to 53.5 MSU 80 80 5 to 30 5 to 30 5 to 30 5 to 65 100 100 CRJ Symbol: A58 The rotation axis is reversed. The long shaft and short shaft are shortened.

Air Slide Table Series MXS

Shock absorber (Refer to page 71.) 9.5 10 5.5 10 21 K 5.5 NA x M5 x 0.8 thread depth 5.5 KA 21 Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 37.5 12 6 N x M5 x 0.8 thread depth 6 Note) (Helisert) 6 4 x M5 x 0.8 thread depth 7 1 18 (With stroke adjuster at extension end) 3.5 (With stroke adjuster at retraction end) 26 58 35 48 62