08-cs2-e

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Valve seal NBR Tube gasket NBR Piston gasket NBR 46

08-cs2y-e

Grease pack part no.: GR-L-005 (5 g), GR-S-010 (10 g), GR-L-150 (150g) 48

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

Stopper Cylinder Adjustable Mounting Height Type Series RSG

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.

(NVSP4026) SOL 4/5 PORT, 21, V4000F(NVSP4026), .00220 lb

EQUIPMENT, ARP PRECISION REGULATOR, 21, ARP NO SIZE RATING, 0.10824 lb

) SOL 4/5 PORT, 21, V4000F(NVSP4026), .00201 lb

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings

ARP PRECISION REGULATOR, 21, ARP NO SIZE RATING, 0.10824 lb

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings

Expelling contaminants outside a clean room can be done by: (11-) vacuum relief or (10- or 12-) exhaust relief. The 2*-CXSJ Copper, Fluorine, Silicone-free Series is a dual piston actuator with non-rotating accuracy ± 0.1° enhanced with lithium soap based grease making it clean room ready.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

The use of 34 pin connectors allows up to 16 stations with double solenoids.Fluid: air, Operating pressure range: -100kPa to 0.7MPa, Response time ms (at 0.5MPa): 18 or less, Coil rated voltage: 12, 24VDC, Ambient and fluid temperature: -10 to 50 C, Enclosure: IP67 (based on IEC529) SS5V1 MANIFOLD SV1000. 21 STATION SV1000 TIE ROD. VALVE. SS5V1 NO SIZE RATING. .04114 lb. 21.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x