Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Compact Cylinder with Lock Series CLQ

1 u @5r @6 @6 !5 !5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 A B CLJ2 CLM2 A CLG1 CL1 B Extension locking Without magnet !0o#1 @8 t MLGC Section A-A' CNG MNB !3 @0 CNA CNS Section B-B' (Both ends tapped) CLS Retraction locking CLQ Section B-B' (Through-hole) !4 !7 !8 #3 RLQ MLU MLGP ML1C With bumper Rod end male thread Note) The sectional drawing above shows the locked condition.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M3E 1 3 1 3 M3E = x FE x Y = x 309.7 x 53.6 x 10= 5.53 (Nm) FE Y Load factor = ME/ME max = 5.53/42.9 = 0.13 M 6 Sum and examination of guide load factors = + + + + = 0.571 The above calculation is within the allowable value and the selected model can be used. Select a separate shock absorber.

Modular Type Regulators Series AR

Note 6) Note 6) Note 6) Note 6) Note 5) Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

CY1F

When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops. Then tighten an additional 1/6 to 1/4 turn. (2) Rc1/8 Tighten with a 7 to 9Nm torque using tightening tools. 30 Series CY1F Specific Product Precautions 3 Be sure to read before handling. Adjustment Caution Caution 1.

MTS

0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

Intrinsically Safe Valve

1/4 1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) N7 (1/4" Onetouch fitting) N9 (5/16" Onetouch fitting) 1/4 C6 (6 One-touch fitting) C8 (8 One-touch fitting) N7 (1/4" Onetouch fitting) N9 (5/16" Onetouch fitting) C10 (10 Onetouch fitting) N11 (3/8" Onetouch fitting) Port size A, B port Manifold base weight W (g) n: Stations W = 100n + 151 W = 79n + 127 W = 61n + 101 Note 1) For

AC Servo Motor Driver (SSCNET Type)

(Note 6) SSCNET cable (option) 10k Plate SD 2m Max CN1A SW1 (Note 8) SW2 CN1B 2 1 (Note 1) Between electrodes MR-J3-B LECSS-S (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 MR-J3-B (Note 7) LECSS-S (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS-S (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 Refer toLECSS Operation Manual,section 3.2

REC

8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204 M10 x 1.25 6 8 37.5 5.5 20 32 42.5 M26 x 1.5 Up to 1000 1/8 159 41 217 M10 x 1.25 6 8 46.5 5.5 22 40 CEP1 51 M32 x 2 Up to 1000 1/4 181 45 247 M14 x 1.5 8 10 56.2 7 26.5 CE1 Rear flange style: RECG CE2 NN H2 2-RcP Width across flats B2 4-7 H1 G G Standard port Mounting hole ML2B Plugged (M5 x 0.8) Width

NCA1

5 Piston rod Carbon steel 1 6 Anodized Cushion A Aluminum alloy 1 7 Anodized Cushion B Aluminum alloy 1 8 Piston Aluminum alloy 1 9 Seal kits include the following parts: 1 Rod seal 1 Piston seal 1 Gland seal 2 Cylinder tube gasket * Cushion seal is not included for XB6, XB5B6, XB7, and XB5B7 over 5" bore Piston gasket NBR 1 10 2 Cushion valve seal 2 Grease pack 1 Loctite 243 Magnet (1) 11

Series MXP Precision Air Slide Table

Contents 6 2 pieces each of No.12 and 13 MXPJ6-PS 166 166 Precision Air Slide Table Series MXP Dimensions 6 MXPJ6 Scale:100% 4-M30.5, 3 deep 7 5 H 3 D B 18 10.05 3.5 16.5 14 13 20 6 6 F 6 5 2-M40.7 Bottom hole diameter 3.3 Piping port 13.5 2-M30.5 170.05 (Plug:M-3P) Base side for mounting B D M 1 Stroke : S 5 J Z 2.4 Piping port 2-M30.5 (mm) Model F H J M S Z MXPJ65 25 38 27 37 5 44 MXPJ6

DOC1020530

Command bit setting of Controlword Bit 3 Bit 1 Command Transition No. Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 23 23 20 20 20 163 173 175 187 218 218 264 264 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8

Compact Cylinder with Air Cushion

8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

SJ3A6

11-1-l EX180-ll SJ3000-53-2A 4 5 6 Refer to page 61.

AC Servo Motor Driver (MECHATROLINK-III type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYU Operation Manual (Simplified Edition),section 4.4.1.

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17