C76

bronze 2 2 2 2 2 2 2 2 1 2 !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

0 0 0 1.5 4 A 2 2 2 7.5 10 B 2 2 2 5.5 8 A 4.5 4.5 4.5 10 12.5 B 9.5 9.5 9.5 13 15.5 Hs 116 124 134.5 144 154 Hs 126 134 144.5 154 164 Hs 75.5 81 89 97 107 Ht 69.5 76.5 87.5 97.5 108 Hs 74.5 80 88 96 107.5 Ht 70 76.5 87.5 97.5 108 B 9.5 9.5 9.5 15 17.5 B 4.5 4.5 4.5 8 10.5 Operating Range D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Auto switch model Bore size (

MXS Series Air Slide Table

0 HA GA 5H9 4 deep +0.030 0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40

High Vacuum Angle Valve, XL Series

Electrical entry Fitting size Grommet Conduit Terminal DIN terminal G C T D 2 3 1/4 B 3/8 B Refer to table 1 below for applications. Refer to Table 2 below for applications.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

2!

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

VM

Push Button (Mushroom)/VM220-02-30R, B, G, Y/VM230-02-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. 3.5-22 VM200 Series VM200 Push Button (Extended)/VM220-02-32R, B, G, Y/VM230-02-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

CL

BP BP lock-up port, Unlocked when pressurized A BP BP lock-up port B With rod boot S + Stroke Long stroke 2-Rc P EA D e 4-LD Plug cap 2 positions Plug cap 2 positions Plug cap 2 positions Width across flats KA l LS + Stroke ZZ + Stroke h + l ZZ + l + Stroke Bore size (mm) Stroke range (mm) F FA GA GB GC H1 K KA LD LH J A AL B B1 BX BY C D EA EB BP Without rod boot With rod boot Up to 500

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Single Axis Electric Actuator Series LJ1H

C D B A 3 Standard Motor Series LJ1H10 Motor Output Rolled Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 F 2 NB 1 Cable entry direction Top entry Power supply voltage 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Cable entry direction Cable length Left entry F R L T B 1 2 Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs.

VQC

type (Slotted) N.C N.C 12 VDC 5 6 4 position dual 3 port valve (B) 2 position double (metal) 24 VDC Note) (A) 4 (B) 2 (A) 4 (B) 2 B Note) S kit is only available for 24 VDC.

Compact

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

) (n = 2, 3, 4, 5) D-A9mV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) Band mounting D-C7m D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Find the inertial moment B for the rotation of shaft (B). 3 + m2 a22 + K (Example) When shape of m2 is a sphere, refer to 7, and K = m2 2r2 2.

Compressed Air Preparation Filter

Improved visibility due to 2-color indication Functional element (Green) Element requiring replacement (Red) 2 Modular Connection Type Compressed Air Preparation Filter AFF/AM/AMD/AMK Series Lightweight Series Size Weight [kg] Reduction rate [%] Weight AFF/AM/AMD1 20 0.19 b 0.38 50 Max. 50% lighter 1 30 0.39 b 0.55 29 0.19 kg b 0.38 kg 40 0.79 b 0.9 12 50 1.23 b 1.4 12 60 1.46 b 2.1 30 AMK2

Booster Regulator/Air Tank

: C EXH: C Spare port Rc1/2 (A) AMR D D (A) (B) (B) OUT OUT 305 Tank OUT port Rc1/2 ARM 216 216 180 4 x 13 4 x 13 50 50 ARP Drain valve 100 100 Drain port Rc1/4 IR-A 200 200 400 700 678 IR Booster regulator model A B C D VBA20A 481 394 Rc3/8 VBA40A 520 429.8 Rc1/2 VBA22A 444 394 Rc3/8 469 VBA42A 477 429.8 Rc1/2 493 IRV The length may be longer than the specification if the plugs mounted

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting