MHZ2/MHZJ2

0.5 0.5 1 0.4 0.5 1 0.5 0.5 1 0.4 0.4 0.8 0.5 0.4 0.8 0.5 __ 0.5 0.4 0.8 1 0.5 0.5 1 0.4 0.8 0.5 Note) Auto switches are not applicable to blank sections in the table.

MK

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6. 1. Allowable bending moment Use the arm length and operating pressure within graph (1) for allowable bending moment loaded piston rod. Graph (1) Caution MK50/63 Mounting of Clamp Arm MK32/40 RE A B 1. Use a clamp arm that is available as an option.

Servo Motor Controller (24 VDC)

1) Input IN0 (4) BUSY output turns on (9) IN1 (5) Turn off DRIVE input PLC (6) OUT0 (6) Step No.1 output turns on (OUT0 output turns on) Move at low speed after passing the Position of the Step No.1 Push the workpiece with the specified Pushing force (7) INP output turns on (14) OUT1 Output (15)(11)(7)(3) INP (16)(12)(8)(4) BUSY (8) BUSY output turns off Step No.1 Pushing operation

CLA

i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V. SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!

SI Unit for Vacuum Manifold

Table. 6-1 User specific RecordData Index Slot No. Sub Slot No. Access Size Content 0x0020 1 1 Write 1 byte Zero clear 0x0021 1 1 Write 1 byte Valve protection release Table. 6-2 Description of User specific RecordData Content Description Value 0: No zero clear request. 1: Zero clear request. 2: Zero clear reset request. Zero clear Adjust pressure value to 0 kPa at atmospheric pressure.

Lubricator

Structural Drawing, Option and Replacement Parts Structural drawing / Option / Replacement parts AL30-D / AL40-D AL50-D / AL60-D AL20-D (2) (3) (2) (3) (1) (1) (5) (4) (5) (4) (6) (6) (7) (7) Option Description No. Note 1) Part No.

AIR FILTER

Recommended torque unitNm Screw M5 1/8 1/4 3/8 1/2 3/4 Torque *1 79 1214 2224 2830 2830 1 3638 *1: First, tighten it by hand , then give it an additional 1/6 turn with a wrench. Do not apply any torsional moment, or bending moment except the weight of the air filter itself. External piping needs to be supported separately.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Note1) Metric size Inch size 02 2 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 04 4 06 6 Note 1) For selecting applicable tubing O.D., refer to the Model on page 667. The color of the release button is white (metric, inch). Note 2) Use 1/8" tube.

Large Size Vacuum Module: Series ZR

Both sides Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 station only 1 1 1 station only Thread type 6 stations only All stations A 6 Nil F G Note) Rc 6 6 stations only A All stations T NPTF When the spacers are attached to the specified locations, specify all spacers.

Fieldbus system PROFINET compatible SI Unit

error 1 0: Set size or less 1: Exceeding size 2 PwrShort L+ short circuit or P24 short circuit 0: No short circuit 1: Short circuited 3 CQShort C/Q short circuit 0: No short circuit 1: Short circuited 4 DSStatus Data storage (DS) save status 0: DS saved data error, no DS data 1: DS saved data is valid 5 DevCom Port communication status 0: Device not connected 1: Operate or Preoperate 6 DevErr

AC Servo Motor Driver (SSCNET /H Type)

Linear encoder error 1-1 EDB 2A.2 Linear encoder error 1-2 EDB 2A.3 Linear encoder error 1-3 EDB 2A.4 Linear encoder error 1-4 EDB 2A Linear encoder error 1 2A.5 Linear encoder error 1-5 EDB 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter error 2B.1 Encoder counter error 1 EDB 2B.2 Encoder counter error 2 EDB -68- Alarm

LEC-OM038xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Readjust belt tension to the appropriated value. 5 Damage 1) Abnormal external force Interference of mechanism, eccentric load or excess load leads to cause deformation or damage of the actuator. Eliminate these factors. 6 The table of the actuator with 1) Actuator carries excess load.

ASR

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Fieldbus system EtherNet/IP TM compatible SI unit

Content of diagnosis 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. Unit diagnosis byte1 Bit No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Yes (1) No (1) Yes Yes (W/o indicator light) (1) (1) Coil voltage DIN terminal with surge voltage suppressor Without connector (1) YOS Yes (W/o indicator light) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note 1) DIN is applicable to VQZ200 and 300.

IDX-OM-P023E

3 . 6 Signal output . 3 2 Chapter 4 Checks and inspection 4 . 1 Daily check . 4 1 4 . 2 Parts requiring regular maintenance . 4 1 4. 2. 1 Maintenance of the water-cooled condenser . 4 1 4. 2. 2 Caution for handling the Motor type auto drain . 4 6 Chapter 5 Troubleshooting 5 . 1 Troubleshooting . 5 1 5 . 2 Reset of protective equipment . 5 3 Chapter 6 References 6 . 1 Specification table

JA/JAH/JB/JS

6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 30 35 38 42 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 8 9 9 13 13 13 15 15 18 24 24 24 42 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1100 2500 2500 4400 4400 4400 11000 11000

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5