PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

HEC-OM-S008

to 100% = FF9CH to 0064H 0050h Control operation See chapter 5.10.3 0051h Target temperature 10 to 60.0oC = 03E8H to 1770H *1) 0052h Offset value -9.99 to 9.99oC = FC19H to 03E7H 0053h PB range 0.30 to 9.90oC = 001EH to 03DEH *1) 0054h Reserved R/W 0055h I constant 1 to 999 sec = 0001H to 03E7H 0056h D constant 0.00 to 99.90 sec = 0H to 2706H *1) 0057h Heat output limit 0 to 100% = 0H to

4/5 Port Air Operated Valve Series SYJA3000

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Solid state auto switch: D-M9B, D-M9N B E Model Auto switch operating range Stroke Stroke A 40 50 150 100 75 100 10 20 30 125 75 20 30 125 150 10 40 50 13-/22-MXS6 0.4 0.4 0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 1.5 10 13-/22-MXS8 4.9 0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 26.9 51.9 1.5 11.6 13-/22-MXS12 74.4 32.4 22.4 12.4 14.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 2.5 45.4 15.6 13-/22

F/ISE

Option Part no. 1 Bracket A ZS24A With 2 pcs. of mounting screws 1 Bracket D ZS24D With 2 pcs. of mounting screws 1 Panel mount ZS24E 1 ZS24F Panel mount + Front protection cover 1 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Specifications ZSE50F (Compound pressure) 100 to 100kPa 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000

Rotary Actuator

Size 30 Size 50 to 100 Stopper screw AFor end adjustment in clockwise direction Stopper screw BFor end adjustment in counter clockwise direction Fig. (1) Rotation range of shaft keyway (size 30) Fig. (2) Rotation range of shaft keyway (size 50 to 100) 19 - Internal structure and parts description Rotary actuator internal structure Component parts No.

53

Wired remote controller HRS HRS CV004 1 HRS 090 Accessories HRS 100/150 Symbol Accessories Nil None 1 With cable (Approx. 20 m) 2 With cable (Approx. 50 m) 3 With cable (Approx. 100 m) HRSH 090 HRSH 090 HRSH HRSE HRZ HRZD Wired remote controller Displayed items Operable items HRW Circulating fluid discharge temperature Operation start/stop Circulating fluid discharge set temperature Circulating

Compact manifold regulator ARM5 Series

150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1

EXxx-OMO0027

Ignores excess current per unit for 100 msec. after inrush. Disable Does not ignore excess current Enable Ignores excess current.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

ITV0000

D side 1 2 3 ...

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Hydraulic Cylinder

Hydraulic Cylinder 20, 25, 32, 40 CHN Series 7 MPa CHQ How to Order CHK CHN CHN CHN 25 100 M9BW L C CHM Auto switch mounting bracket Note) Note) This symbol is indicated when the D-A9 or M9 type auto switch is specified. This mounting bracket does not apply to other auto switches (D-C7 and H7, etc.) Applicable to 20 only.

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

ZSM1-115/121

Example: Full scale reading 100 [kPa] Setpoint for output 50 [kPa] Repeatability 1 [% F .S.] F .S. = 100 [kPa] 0 [kPa] = 100 [kPa] 1 [% F .S.] = 100 [kPa] x 0.01 = 1 [kPa] The deviation from the setpoint is 1 [kPa]. This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.)