ML2B

6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Model AS Applicable tubing O.D.

Thermo-chiller

3 !4 !5 !6 No. Description Function 7 Offset function Use this function when there is a temperature offset between the discharge temperature of the thermo-chiller and users equipment.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2.5) 0 -0.1 0 -0.036 7h9 10h9 13h9 17h9 21h9 76 6 (Effective depth 3) 0 -0.1 0 -0.036 106.5 10 (Effective depth 4) 0 -0.1 0 -0.043 134 15 (Effective depth 7) 0 -0.1 0 -0.043 M8 x 1.25 169 17 (Effective depth 8.5) 19.5 0 -0.1 0 -0.052 HA, HB 2H9 2.5H9 4H9 5H9 6H9 HC 2 4 5 5 6 HD HE JA JB 3 3.5 5 7 8 KA 20.3 7.6 14.5 24.5 24.1 KB 1.6 2.2 2.8 3 2.5 LA M2 x 0.4 LB 28.4 37 53 70 81 Model MIW8-

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2.5) 0 -0.1 0 -0.036 7h9 10h9 13h9 17h9 21h9 76 6 (Effective depth 3) 0 -0.1 0 -0.036 106.5 10 (Effective depth 4) 0 -0.1 0 -0.043 134 15 (Effective depth 7) 0 -0.1 0 -0.043 M8 x 1.25 169 17 (Effective depth 8.5) 19.5 0 -0.1 0 -0.052 HA, HB 2H9 2.5H9 4H9 5H9 6H9 HC 2 4 5 5 6 HD HE JA JB 3 3.5 5 7 8 KA 20.3 7.6 14.5 24.5 24.1 KB 1.6 2.2 2.8 3 2.5 LA M2 x 0.4 LB 28.4 37 53 70 81 Model MIW8-

EX600-DX_DY_DM_eng

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

IDX-OM-V020

. 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping. 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS ABOUT REINSTALLATION

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

7.4

S07 1 5 5 MO Serial transmission kit SS0755-SA08C4 S0715-5MO S0725-5MO S07A5-5MO 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no.

E-P HYREG

4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2 2 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY1500/1501 VY1400/1401 VY1300/1301 1 1 1 0.9 0.9 0.9

5 Port Solenoid Valve SY Series

Refer to How to Order Port Block Assembly on page 6. M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

IDX-OM-U010

DISPOSAL . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS. 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping . 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

MXH Series Compact Slide

MXH10 (10) 20 6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Reduced maintenance (No need for control or replacement) Positioning repeatability: 0.01 mm*3 *1 Compared with the LEFS *2 Size 40, Mep, Overhang: 300 mm *3 Excludes the lead H Step Motor Controller JXC Series p. 3 Battery-less Absolute Type (Step Motor 24 VDC) MDirect input type MStep data input type LEKFS Series P-E21-6 Electric Actuator High Rigidity and High Precision

Aluminum High Vacuum Angle Valve

4 5 6 O-ring Part No.

EXxx-OMS0026CN

/IP No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 ( 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -15No.EX-OMS0026CN BUS IN / BUS OUT 1 TX+ 2 RX+ 3 TX4 RXIP67 -16No.EX-OMS0026CN (1) (2) (3) (4) (0.30.4 Nm) OFF OFF, -17No.EX-OMS0026CN Settings 1 Settings 2 1 Hold/Clear 1 2 2 3 3 4 4 IP (4 byte) DHCP 5 5 Reserved 6 6 7 7 8 IP (3byte) 8 Settings1 37() HOLD/CLEAR Settings1 1 OFF OFF

MXW Series Long Stroke Slide Table

MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2) 1Nm = 0.7375 ftlb 1Nm = 0.7375 ftlb Static moment Moment due to work load when cylinder is at rest.