F/ISE

Option Part no. 1 Bracket A ZS24A With 2 pcs. of mounting screws 1 Bracket D ZS24D With 2 pcs. of mounting screws 1 Panel mount ZS24E 1 ZS24F Panel mount + Front protection cover 1 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Specifications ZSE50F (Compound pressure) 100 to 100kPa 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000

Compact manifold regulator ARM5 Series

150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1

EXxx-OMO0027

Ignores excess current per unit for 100 msec. after inrush. Disable Does not ignore excess current Enable Ignores excess current.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

ITV0000

D side 1 2 3 ...

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Hydraulic Cylinder

Hydraulic Cylinder 20, 25, 32, 40 CHN Series 7 MPa CHQ How to Order CHK CHN CHN CHN 25 100 M9BW L C CHM Auto switch mounting bracket Note) Note) This symbol is indicated when the D-A9 or M9 type auto switch is specified. This mounting bracket does not apply to other auto switches (D-C7 and H7, etc.) Applicable to 20 only.

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

ZSM1-115/121

Example: Full scale reading 100 [kPa] Setpoint for output 50 [kPa] Repeatability 1 [% F .S.] F .S. = 100 [kPa] 0 [kPa] = 100 [kPa] 1 [% F .S.] = 100 [kPa] x 0.01 = 1 [kPa] The deviation from the setpoint is 1 [kPa]. This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.)

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

) (in) D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-H7LF D-G59 D-K59 D-H7LF D-G59 D-K59 Auto switch model Auto switch model B 0.42 0.31 0.52 0.51 0.56 0.83 B 0.86 0.59 0.76 0.85 0.75 1.20 A 0.94 0.78 1.00 1.23 1.13 1.58 A 0.94 0.78 1.00 1.23 1.13 1.58 B 0.50 0.39 0.60 0.59 0.64 0.91 B

EX500-GEN2_eng

Branch port C (COM A) 6 Max. 16 devices (Input unit: Max. 2 devices/Output unit: Max. 2 devices per branch) Slave connection nember 7 Branch port D (COM D) 20 m or less total extension per branch Branch cable length Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

30

D-X Technical Data 1141

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Option Part no. 1 Bracket A ZS24A With 2 pcs. of mounting screws 1 Bracket D ZS24D With 2 pcs. of mounting screws 1 Panel mount ZS24E 1 ZS24F Panel mount + Front protection cover 1 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Specifications ZSE50F (Compound pressure) 100 to 100kPa 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure)

Pin Clamp Cylinder Series CKQ/CLKQ

mounting type Applicable auto switch: D-A79W D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-F7WV D-F7BAL D-F7BAVL D-F7W D-J79W D-F7NTL D-F79F D-F7V D-J79C D-F7 D-J79 [For CLKQ] [For CKQ] B A B A U U Direct mounting type Applicable auto switch: D-A9 D-A9V D-F9WV D-F9BAL D-M9V D-F9W [For CKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V